Process to improve the properties of sputtered metal oxide layers

Metal oxide layers for semiconductor sensors or solar cells (e.g. tandem solar cells based on Cu2O) are usually produced by sputtering (HF or RF sputtering).
The novel method basically involves the controlled addition of hydrogen gas during the proper sputtering process. Thus, signif-icant improvements concerning the electrical properties of for example charge carrier concentration, charge carrier mobility and sheet resistance are achieved

Further information: PDF

TransMIT Gesellschaft für Technologietransfer mbH
Phone: +49 (0)641/943 64-12

Contact
Dr. Peter Stumpf

As Germany's association of technology- and patenttransfer agencies TechnologieAllianz e.V. is offering businesses access to the entire range of innovative research results of almost all German universities and numerous non-university research institutions. More than 2000 technology offers of 14 branches are beeing made accessable to businesses in order to assure your advance on the market. At www.technologieallianz.de a free, fast and non-bureaucratic access to all further offers of the German research landscape is offered to our members aiming to sucessfully transfer technologies.