LIBS-Microscopy / Optical Material Analysis
The invention concerns a procedure and apparatus which enable the three-dimensional trace element analysis of material samples by ultra short laser pulse radiant exposure.
Applications of this invention combined with an ultra short pulse laser are the analytics of technical and biological samples as well as ?online-supervision? of laser material processing. The proof of specific substances features extremely high three-dimensional resolution. LIBS (laser induced breakdown spectroscopy) is a known procedure for the analysis of substances in combination with nanosecond- and picosecond lasers. In comparison, the new technique allows a significant reduction of the probed volume.
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