Störungsfreie Ermittlung der Energie von lonenstrahlen

Ionenstrahlen finden in vielen Gebieten wie Medizin, Halbleiterindustrie und auch in der Grundlagenforschung Anwendung. Hierbei werden hohe Anforderungen an die Qualität des Ionenstrahls gestellt, so dass die Bestimmung der Energie des Ionenstrahls, d.h. seine Kalibrierung, essentiell ist.
Die vorliegende Innovation beschreibt ein Messgerät und ein Verfahren um die Energie beschleunigter Ionen zu bestimmen ohne diese zu stören.

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