University of California scientists working with a researcher from Washington State University at Los Alamos National Laboratorys Superconductivity Technology Center have developed a novel method for creating high performance, inorganic metal-oxide films using polymer-assisted deposition, or PAD. The breakthrough could pave the way for a greater use of metal-oxide films into the electronics manufacturing industry.
"The successful creation of both simple and complex metal-oxide films using PAD is part of the significance of this invention," said Dean Peterson, director of the Superconductivity Technology Center. "This technology provides a cost-effective approach to grow electronic and optical materials, which would find wide applications in any fields where the material is needed in the film form."
The PAD process uses a water-based solution to create a high-quality film of nearly any metal oxide. The films can be made from a single or several different metals with controlled atomic weight relationships. Amorphous, polycrystalline, or epitaxial films can be made with thicknesses from 10 nanometers to hundreds of nanometers or thicker. Using PAD, Los Alamos researchers have produced films of simple metal oxides, such as titanium dioxide and zinc oxide, and also complex metal oxides, such as strontium titanate and indium tin oxide.
Todd Hanson | EurekAlert!
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