Direct ReSi – Si-recovery from recycling of SiC-slurry

The production of Si-wafers for solar cells or semiconductors still utilizes wire saw cutting to turn silicon bricks into wafers. The actual cutting is performed by the cutting slurry, a suspension of silicon carbide (SiC) in cooling fluid. Recycling of the waste slurry, which contains silicon (Si) and SiC as valuable materials, can generate cost savings. The demand for Si-wafers, and therefore the need for cost-effective and efficient recycling continuously increases.

After separation of the coarse SiC-particles, the remaining mixture of Si and SiC is treated with acids. Si is concerted into Chlorosilane, and the remaining SiC recovered. The Chlorosilane can be feed into the production process for silicon.

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Dipl.-Ing. Alfred Schillert