novel rotary rate sensor
In the Department of Micromechanics of Saarland University a novel concept of rotary rate sensors with cross-coupled oscillators was developed.
This concept consists in linking the torsion bar on one spot with the substrate in order to suppress dispersion of detection sensitivity. The appliances for torsion emission gather all forces as they are fixed to substrate, thanks to which a mechanical cross-talk between oscillators is suppressed.
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