Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Breakthrough Computer Chip Lithography Method Developed at RIT

13.02.2006


Evanescent wave lithography enables optical imaging to smallest-ever level



A new computer chip lithography method under development at Rochester Institute of Technology has led to imaging capabilities beyond that previously thought possible.

Leading a team of engineering students, Bruce Smith, RIT professor of microelectronic engineering and director of the Center for Nanolithography Research in the Kate Gleason College of Engineering, developed a method—known as evanescent wave lithography, or EWL—capable of optically imaging the smallest-ever semiconductor device geometry. Yongfa Fan, a doctoral student in RIT’s microsystems engineering Ph.D. program, accomplished imaging rendered to 26 nanometers —a size previously possible only via extreme ultraviolet wavelength, Smith says. By capturing images that are beyond the limits of classical physics, the breakthrough has allowed resolution to smaller than one-twentieth the wavelength of visible light, he adds.


The development comes at least five years sooner than anticipated, using the International Technology Roadmap for Semiconductors (http://public.itrs.net) as a guide, Smith says. The roadmap, created by a consortium of industry groups, government organizations, universities, manufacturers and suppliers, assesses semiconductor technology requirements to ensure advancements in the performance of integrated circuits to meet future needs.

“Immersion lithography has pushed the limits of optical imaging,” Smith says. “Evanescent wave lithography continues to extend this reach well into the future. The results are very exciting as images can be formed that are not supposed to exist.”

Evanescent wave lithography is an “enabling technology” permitting better understanding of how building blocks are created for future microelectronic and nanotechnology devices—the technology that consumers will use over the next five to 10 years, Smith explains.

Smith will present research at Microlithography 2006, a symposium sponsored by the International Society for Optical Engineering, on Feb. 21, in San Jose, Calif.

Michael Saffran | EurekAlert!
Further information:
http://www.rit.edu

More articles from Physics and Astronomy:

nachricht Studying fundamental particles in materials
17.01.2017 | Max-Planck-Institut für Struktur und Dynamik der Materie

nachricht Seeing the quantum future... literally
16.01.2017 | University of Sydney

All articles from Physics and Astronomy >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Interfacial Superconductivity: Magnetic and superconducting order revealed simultaneously

Researchers from the University of Hamburg in Germany, in collaboration with colleagues from the University of Aarhus in Denmark, have synthesized a new superconducting material by growing a few layers of an antiferromagnetic transition-metal chalcogenide on a bismuth-based topological insulator, both being non-superconducting materials.

While superconductivity and magnetism are generally believed to be mutually exclusive, surprisingly, in this new material, superconducting correlations...

Im Focus: Studying fundamental particles in materials

Laser-driving of semimetals allows creating novel quasiparticle states within condensed matter systems and switching between different states on ultrafast time scales

Studying properties of fundamental particles in condensed matter systems is a promising approach to quantum field theory. Quasiparticles offer the opportunity...

Im Focus: Designing Architecture with Solar Building Envelopes

Among the general public, solar thermal energy is currently associated with dark blue, rectangular collectors on building roofs. Technologies are needed for aesthetically high quality architecture which offer the architect more room for manoeuvre when it comes to low- and plus-energy buildings. With the “ArKol” project, researchers at Fraunhofer ISE together with partners are currently developing two façade collectors for solar thermal energy generation, which permit a high degree of design flexibility: a strip collector for opaque façade sections and a solar thermal blind for transparent sections. The current state of the two developments will be presented at the BAU 2017 trade fair.

As part of the “ArKol – development of architecturally highly integrated façade collectors with heat pipes” project, Fraunhofer ISE together with its partners...

Im Focus: How to inflate a hardened concrete shell with a weight of 80 t

At TU Wien, an alternative for resource intensive formwork for the construction of concrete domes was developed. It is now used in a test dome for the Austrian Federal Railways Infrastructure (ÖBB Infrastruktur).

Concrete shells are efficient structures, but not very resource efficient. The formwork for the construction of concrete domes alone requires a high amount of...

Im Focus: Bacterial Pac Man molecule snaps at sugar

Many pathogens use certain sugar compounds from their host to help conceal themselves against the immune system. Scientists at the University of Bonn have now, in cooperation with researchers at the University of York in the United Kingdom, analyzed the dynamics of a bacterial molecule that is involved in this process. They demonstrate that the protein grabs onto the sugar molecule with a Pac Man-like chewing motion and holds it until it can be used. Their results could help design therapeutics that could make the protein poorer at grabbing and holding and hence compromise the pathogen in the host. The study has now been published in “Biophysical Journal”.

The cells of the mouth, nose and intestinal mucosa produce large quantities of a chemical called sialic acid. Many bacteria possess a special transport system...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

12V, 48V, high-voltage – trends in E/E automotive architecture

10.01.2017 | Event News

2nd Conference on Non-Textual Information on 10 and 11 May 2017 in Hannover

09.01.2017 | Event News

Nothing will happen without batteries making it happen!

05.01.2017 | Event News

 
Latest News

Water - as the underlying driver of the Earth’s carbon cycle

17.01.2017 | Earth Sciences

Interfacial Superconductivity: Magnetic and superconducting order revealed simultaneously

17.01.2017 | Materials Sciences

Smart homes will “LISTEN” to your voice

17.01.2017 | Architecture and Construction

VideoLinks
B2B-VideoLinks
More VideoLinks >>>