Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Software corrects chip errors early

10.05.2004


Microchip miniaturization is making quality control-related measurement of features during the production process increasingly difficult. New National Institute of Standards and Technology (NIST) software and research results* should help manufacturers reduce errors in measuring microchip features which today measure less than 37 nanometers (about 1.5 millionths of an inch) in width and are expected to shrink to 25 nanometers (about 1 millionth of an inch) by 2007.



Currently, most semiconductor manufacturers use scanning electron microscopes (SEMs) to measure circuitry lines when the chip is first being patterned. Circuit dimensions are formed when ultraviolet light is shined on a thin film of polymer laid over silicon. Exposed areas harden, allowing unexposed areas to be chemically etched into tiny troughs for laying down circuit lines. Errors caught before etching may be correctable, while those caught later may result in scrapping the wafer and loss of a sizeable investment.

The NIST software equips the SEMs with a "model library" of possible line measurements. Technicians can use the enhanced SEMs to match measured images with library images in order to more accurately determine the shapes and sizes of features. Using the new software can cut measurement errors from tens of nanometers down to a few nanometers. The new method also is more reliable. There is about three times less variation among repeated measurements of the same circuit feature using the software than with the current most commonly used method.



NIST and International SEMATECH, a consortium of leading semiconductor manufacturers that represent about half the world’s semiconductor production, funded the "model library" work.

John Blair | EurekAlert!
Further information:
http://www.nist.gov/

More articles from Information Technology:

nachricht Ultra-precise chip-scale sensor detects unprecedentedly small changes at the nanoscale
18.01.2017 | The Hebrew University of Jerusalem

nachricht Data analysis optimizes cyber-physical systems in telecommunications and building automation
18.01.2017 | Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI

All articles from Information Technology >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Traffic jam in empty space

New success for Konstanz physicists in studying the quantum vacuum

An important step towards a completely new experimental access to quantum physics has been made at University of Konstanz. The team of scientists headed by...

Im Focus: How gut bacteria can make us ill

HZI researchers decipher infection mechanisms of Yersinia and immune responses of the host

Yersiniae cause severe intestinal infections. Studies using Yersinia pseudotuberculosis as a model organism aim to elucidate the infection mechanisms of these...

Im Focus: Interfacial Superconductivity: Magnetic and superconducting order revealed simultaneously

Researchers from the University of Hamburg in Germany, in collaboration with colleagues from the University of Aarhus in Denmark, have synthesized a new superconducting material by growing a few layers of an antiferromagnetic transition-metal chalcogenide on a bismuth-based topological insulator, both being non-superconducting materials.

While superconductivity and magnetism are generally believed to be mutually exclusive, surprisingly, in this new material, superconducting correlations...

Im Focus: Studying fundamental particles in materials

Laser-driving of semimetals allows creating novel quasiparticle states within condensed matter systems and switching between different states on ultrafast time scales

Studying properties of fundamental particles in condensed matter systems is a promising approach to quantum field theory. Quasiparticles offer the opportunity...

Im Focus: Designing Architecture with Solar Building Envelopes

Among the general public, solar thermal energy is currently associated with dark blue, rectangular collectors on building roofs. Technologies are needed for aesthetically high quality architecture which offer the architect more room for manoeuvre when it comes to low- and plus-energy buildings. With the “ArKol” project, researchers at Fraunhofer ISE together with partners are currently developing two façade collectors for solar thermal energy generation, which permit a high degree of design flexibility: a strip collector for opaque façade sections and a solar thermal blind for transparent sections. The current state of the two developments will be presented at the BAU 2017 trade fair.

As part of the “ArKol – development of architecturally highly integrated façade collectors with heat pipes” project, Fraunhofer ISE together with its partners...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Sustainable Water use in Agriculture in Eastern Europe and Central Asia

19.01.2017 | Event News

12V, 48V, high-voltage – trends in E/E automotive architecture

10.01.2017 | Event News

2nd Conference on Non-Textual Information on 10 and 11 May 2017 in Hannover

09.01.2017 | Event News

 
Latest News

Molecule flash mob

19.01.2017 | Physics and Astronomy

Rabies viruses reveal wiring in transparent brains

19.01.2017 | Health and Medicine

Global threat to primates concerns us all

19.01.2017 | Ecology, The Environment and Conservation

VideoLinks
B2B-VideoLinks
More VideoLinks >>>