The air-conditioning system and most of the cleanroom structures that were damaged in the fire have been completely replaced. Covering a floor area of 1,100 m², the cleanroom suffered considerable damage in the fire, with the cost of renovation and refurnishing estimated at approximately EUR 13.5 million. The new and restored research equipment is currently being installed, and process start-up was begun at the same time as the installation work. The facilities are expected to be in full working order and available for research by the end of the year.
The cleanroom serves research in micro- and nanoelectronics, using equipment such as a CMOS-based production line for integrated circuits and MEMS components, as well as specialised equipment for deep etching in silicon and silicon dioxide. The facilities also house equipment required for materials research, particularly for the needs of nanoelectronics research.
Much of the research equipment destroyed in the fire has been replaced with new, equally powerful equipment. For example, migration from 100 mm to 150 mm wafer size in the production of integrated circuits and semiconductor components can be regarded as a significant improvement, furthering VTT's partnering opportunities with the industrial sector.
Micronova is a leading centre for excellence in micro- and nanotechnology run jointly by the VTT Technical Research Centre of Finland and the Helsinki University of Technology. There are nearly 300 research specialists working at the Micronova facilities in Otaniemi, Espoo. This building is the largest cleanroom used for micro- and nanoelectronics in the Nordic region. Micronova partners with various universities, research institutes and commercial enterprises in international world-class research.
Sirpa Posti | alfa
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