Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

VTT's world-class cleanroom facilities restored to full operational condition

03.11.2006
VTT Technical Research Centre of Finland offers world-class research in microelectronics. The VTT cleanroom at Micronova facilities in Espoo, Finland that suffered considerable damage in February because of a fire has now been fully restored to service condition. It is expected that research activities can be resumed within the next few weeks.

The air-conditioning system and most of the cleanroom structures that were damaged in the fire have been completely replaced. Covering a floor area of 1,100 m², the cleanroom suffered considerable damage in the fire, with the cost of renovation and refurnishing estimated at approximately EUR 13.5 million. The new and restored research equipment is currently being installed, and process start-up was begun at the same time as the installation work. The facilities are expected to be in full working order and available for research by the end of the year.

The cleanroom serves research in micro- and nanoelectronics, using equipment such as a CMOS-based production line for integrated circuits and MEMS components, as well as specialised equipment for deep etching in silicon and silicon dioxide. The facilities also house equipment required for materials research, particularly for the needs of nanoelectronics research.

Much of the research equipment destroyed in the fire has been replaced with new, equally powerful equipment. For example, migration from 100 mm to 150 mm wafer size in the production of integrated circuits and semiconductor components can be regarded as a significant improvement, furthering VTT's partnering opportunities with the industrial sector.

Micronova is a leading centre for excellence in micro- and nanotechnology run jointly by the VTT Technical Research Centre of Finland and the Helsinki University of Technology. There are nearly 300 research specialists working at the Micronova facilities in Otaniemi, Espoo. This building is the largest cleanroom used for micro- and nanoelectronics in the Nordic region. Micronova partners with various universities, research institutes and commercial enterprises in international world-class research.

Sirpa Posti | alfa
Further information:
http://www.vtt.fi

More articles from Power and Electrical Engineering:

nachricht Industrial Maturity of Electrically Conductive Adhesives for Silicon Solar Cells Demonstrated
25.04.2018 | Fraunhofer-Institut für Solare Energiesysteme ISE

nachricht Silicon as a new storage material for the batteries of the future
25.04.2018 | Christian-Albrechts-Universität zu Kiel

All articles from Power and Electrical Engineering >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: BAM@Hannover Messe: innovative 3D printing method for space flight

At the Hannover Messe 2018, the Bundesanstalt für Materialforschung und-prüfung (BAM) will show how, in the future, astronauts could produce their own tools or spare parts in zero gravity using 3D printing. This will reduce, weight and transport costs for space missions. Visitors can experience the innovative additive manufacturing process live at the fair.

Powder-based additive manufacturing in zero gravity is the name of the project in which a component is produced by applying metallic powder layers and then...

Im Focus: Molecules Brilliantly Illuminated

Physicists at the Laboratory for Attosecond Physics, which is jointly run by Ludwig-Maximilians-Universität and the Max Planck Institute of Quantum Optics, have developed a high-power laser system that generates ultrashort pulses of light covering a large share of the mid-infrared spectrum. The researchers envisage a wide range of applications for the technology – in the early diagnosis of cancer, for instance.

Molecules are the building blocks of life. Like all other organisms, we are made of them. They control our biorhythm, and they can also reflect our state of...

Im Focus: Spider silk key to new bone-fixing composite

University of Connecticut researchers have created a biodegradable composite made of silk fibers that can be used to repair broken load-bearing bones without the complications sometimes presented by other materials.

Repairing major load-bearing bones such as those in the leg can be a long and uncomfortable process.

Im Focus: Writing and deleting magnets with lasers

Study published in the journal ACS Applied Materials & Interfaces is the outcome of an international effort that included teams from Dresden and Berlin in Germany, and the US.

Scientists at the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) together with colleagues from the Helmholtz-Zentrum Berlin (HZB) and the University of Virginia...

Im Focus: Gamma-ray flashes from plasma filaments

Novel highly efficient and brilliant gamma-ray source: Based on model calculations, physicists of the Max PIanck Institute for Nuclear Physics in Heidelberg propose a novel method for an efficient high-brilliance gamma-ray source. A giant collimated gamma-ray pulse is generated from the interaction of a dense ultra-relativistic electron beam with a thin solid conductor. Energetic gamma-rays are copiously produced as the electron beam splits into filaments while propagating across the conductor. The resulting gamma-ray energy and flux enable novel experiments in nuclear and fundamental physics.

The typical wavelength of light interacting with an object of the microcosm scales with the size of this object. For atoms, this ranges from visible light to...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

VideoLinks
Industry & Economy
Event News

Invitation to the upcoming "Current Topics in Bioinformatics: Big Data in Genomics and Medicine"

13.04.2018 | Event News

Unique scope of UV LED technologies and applications presented in Berlin: ICULTA-2018

12.04.2018 | Event News

IWOLIA: A conference bringing together German Industrie 4.0 and French Industrie du Futur

09.04.2018 | Event News

 
Latest News

Getting electrons to move in a semiconductor

25.04.2018 | Physics and Astronomy

Reconstructing what makes us tick

25.04.2018 | Physics and Astronomy

Cheap 3-D printer can produce self-folding materials

25.04.2018 | Information Technology

VideoLinks
Science & Research
Overview of more VideoLinks >>>