Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:


VTT's world-class cleanroom facilities restored to full operational condition

VTT Technical Research Centre of Finland offers world-class research in microelectronics. The VTT cleanroom at Micronova facilities in Espoo, Finland that suffered considerable damage in February because of a fire has now been fully restored to service condition. It is expected that research activities can be resumed within the next few weeks.

The air-conditioning system and most of the cleanroom structures that were damaged in the fire have been completely replaced. Covering a floor area of 1,100 m², the cleanroom suffered considerable damage in the fire, with the cost of renovation and refurnishing estimated at approximately EUR 13.5 million. The new and restored research equipment is currently being installed, and process start-up was begun at the same time as the installation work. The facilities are expected to be in full working order and available for research by the end of the year.

The cleanroom serves research in micro- and nanoelectronics, using equipment such as a CMOS-based production line for integrated circuits and MEMS components, as well as specialised equipment for deep etching in silicon and silicon dioxide. The facilities also house equipment required for materials research, particularly for the needs of nanoelectronics research.

Much of the research equipment destroyed in the fire has been replaced with new, equally powerful equipment. For example, migration from 100 mm to 150 mm wafer size in the production of integrated circuits and semiconductor components can be regarded as a significant improvement, furthering VTT's partnering opportunities with the industrial sector.

Micronova is a leading centre for excellence in micro- and nanotechnology run jointly by the VTT Technical Research Centre of Finland and the Helsinki University of Technology. There are nearly 300 research specialists working at the Micronova facilities in Otaniemi, Espoo. This building is the largest cleanroom used for micro- and nanoelectronics in the Nordic region. Micronova partners with various universities, research institutes and commercial enterprises in international world-class research.

Sirpa Posti | alfa
Further information:

More articles from Power and Electrical Engineering:

nachricht Fluorescent holography: Upending the world of biological imaging
25.10.2016 | Colorado State University

nachricht Did you know that infrared heating is an essential part of automotive manufacture?
25.10.2016 | Heraeus Noblelight GmbH

All articles from Power and Electrical Engineering >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Etching Microstructures with Lasers

Ultrafast lasers have introduced new possibilities in engraving ultrafine structures, and scientists are now also investigating how to use them to etch microstructures into thin glass. There are possible applications in analytics (lab on a chip) and especially in electronics and the consumer sector, where great interest has been shown.

This new method was born of a surprising phenomenon: irradiating glass in a particular way with an ultrafast laser has the effect of making the glass up to a...

Im Focus: Light-driven atomic rotations excite magnetic waves

Terahertz excitation of selected crystal vibrations leads to an effective magnetic field that drives coherent spin motion

Controlling functional properties by light is one of the grand goals in modern condensed matter physics and materials science. A new study now demonstrates how...

Im Focus: New 3-D wiring technique brings scalable quantum computers closer to reality

Researchers from the Institute for Quantum Computing (IQC) at the University of Waterloo led the development of a new extensible wiring technique capable of controlling superconducting quantum bits, representing a significant step towards to the realization of a scalable quantum computer.

"The quantum socket is a wiring method that uses three-dimensional wires based on spring-loaded pins to address individual qubits," said Jeremy Béjanin, a PhD...

Im Focus: Scientists develop a semiconductor nanocomposite material that moves in response to light

In a paper in Scientific Reports, a research team at Worcester Polytechnic Institute describes a novel light-activated phenomenon that could become the basis for applications as diverse as microscopic robotic grippers and more efficient solar cells.

A research team at Worcester Polytechnic Institute (WPI) has developed a revolutionary, light-activated semiconductor nanocomposite material that can be used...

Im Focus: Diamonds aren't forever: Sandia, Harvard team create first quantum computer bridge

By forcefully embedding two silicon atoms in a diamond matrix, Sandia researchers have demonstrated for the first time on a single chip all the components needed to create a quantum bridge to link quantum computers together.

"People have already built small quantum computers," says Sandia researcher Ryan Camacho. "Maybe the first useful one won't be a single giant quantum computer...

All Focus news of the innovation-report >>>



Event News

#IC2S2: When Social Science meets Computer Science - GESIS will host the IC2S2 conference 2017

14.10.2016 | Event News

Agricultural Trade Developments and Potentials in Central Asia and the South Caucasus

14.10.2016 | Event News

World Health Summit – Day Three: A Call to Action

12.10.2016 | Event News

Latest News

Ice shelf vibrations cause unusual waves in Antarctic atmosphere

25.10.2016 | Earth Sciences

Fluorescent holography: Upending the world of biological imaging

25.10.2016 | Power and Electrical Engineering

Etching Microstructures with Lasers

25.10.2016 | Process Engineering

More VideoLinks >>>