Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Revolutionary Electrode Formation Method for Si Nano Devices Realized by University-IAI Collaboration

02.02.2011
Discovery of Breakthrough Electrode Formation Method without Accompanying Doping into Si Substrate

The Advanced Electronic Materials Center (Managing Director: Toyohiro Chikyo) of the National Institute for Materials Science (President: Sukekatsu Ushioda), in joint work with Chiba University, Tokyo Institute of Technology, Nagoya University, the University of Tsukuba, Waseda University, and JST-CREST, developed a new electrode formation method for realization of future nano devices.

In this development project, the possibility of controlling the height of the Schottky barrier at metal/Si interfaces by doping only the metal side, without modifying the Si side, was predicted theoretically by Chiba University, and this was demonstrated in collaborative experiments by NIMS, Tokyo Institute of Technology, Nagoya University, the University of Tsukuba, Waseda University, and JST-CREST. This is an unprecedented new electrode formation method.

With Si semiconductors, a good metal/Si bond had been realized by doping the Si side in order to achieve an electrode/Si bond with a low contact resistance value.

However, with miniaturization of devices, deviations in the positions and the concentration of dopants added to the Si side began to affect the metal/Si interface, and it had become impossible to realize a stable electrode structure.

Subsequently, with further miniaturization of the junction region in Si devices, there was a tendency in structural design toward 3-dimensional devices using Si wiring. However, until now, there was no method of forming stable electrodes, and various problems also arose, such as large contact resistance, etc. The results of this research provide a revolutionary method which solves the problems encountered to date.

In integrated circuits and future nano devices, an understanding of the formation process of materials in nano spaces and the properties of those materials from the fundamental mechanism will contribute to solving essential problems. The results of the present research were demonstrated for the first time through collaboration by a large number of research institutions and researchers with various specialties.

Contact information:

For more detail:

Toyohiro Chikyo
Advanced Electronic Materials Center
National Institute for Materials Science
TEL: +81-29-860-4725
E-MailFchikyo.toyohiro@nims.go.jp
For general inquiry:
Public Relations Office, NIMS
TEL:+81-29-859-2026
FAX:+81-29-859-2017
E-MailFpr@nims.go.jp

Mikiko Tanifuji | Research asia research news
Further information:
http://www.nims.go.jp

More articles from Materials Sciences:

nachricht Nagoya University researchers break down plastic waste
29.05.2017 | Nagoya University

nachricht A new tool for discovering nanoporous materials
23.05.2017 | Ecole Polytechnique Fédérale de Lausanne

All articles from Materials Sciences >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Strathclyde-led research develops world's highest gain high-power laser amplifier

The world's highest gain high power laser amplifier - by many orders of magnitude - has been developed in research led at the University of Strathclyde.

The researchers demonstrated the feasibility of using plasma to amplify short laser pulses of picojoule-level energy up to 100 millijoules, which is a 'gain'...

Im Focus: Can the immune system be boosted against Staphylococcus aureus by delivery of messenger RNA?

Staphylococcus aureus is a feared pathogen (MRSA, multi-resistant S. aureus) due to frequent resistances against many antibiotics, especially in hospital infections. Researchers at the Paul-Ehrlich-Institut have identified immunological processes that prevent a successful immune response directed against the pathogenic agent. The delivery of bacterial proteins with RNA adjuvant or messenger RNA (mRNA) into immune cells allows the re-direction of the immune response towards an active defense against S. aureus. This could be of significant importance for the development of an effective vaccine. PLOS Pathogens has published these research results online on 25 May 2017.

Staphylococcus aureus (S. aureus) is a bacterium that colonizes by far more than half of the skin and the mucosa of adults, usually without causing infections....

Im Focus: A quantum walk of photons

Physicists from the University of Würzburg are capable of generating identical looking single light particles at the push of a button. Two new studies now demonstrate the potential this method holds.

The quantum computer has fuelled the imagination of scientists for decades: It is based on fundamentally different phenomena than a conventional computer....

Im Focus: Turmoil in sluggish electrons’ existence

An international team of physicists has monitored the scattering behaviour of electrons in a non-conducting material in real-time. Their insights could be beneficial for radiotherapy.

We can refer to electrons in non-conducting materials as ‘sluggish’. Typically, they remain fixed in a location, deep inside an atomic composite. It is hence...

Im Focus: Wafer-thin Magnetic Materials Developed for Future Quantum Technologies

Two-dimensional magnetic structures are regarded as a promising material for new types of data storage, since the magnetic properties of individual molecular building blocks can be investigated and modified. For the first time, researchers have now produced a wafer-thin ferrimagnet, in which molecules with different magnetic centers arrange themselves on a gold surface to form a checkerboard pattern. Scientists at the Swiss Nanoscience Institute at the University of Basel and the Paul Scherrer Institute published their findings in the journal Nature Communications.

Ferrimagnets are composed of two centers which are magnetized at different strengths and point in opposing directions. Two-dimensional, quasi-flat ferrimagnets...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Marine Conservation: IASS Contributes to UN Ocean Conference in New York on 5-9 June

24.05.2017 | Event News

AWK Aachen Machine Tool Colloquium 2017: Internet of Production for Agile Enterprises

23.05.2017 | Event News

Dortmund MST Conference presents Individualized Healthcare Solutions with micro and nanotechnology

22.05.2017 | Event News

 
Latest News

New insights into the ancestors of all complex life

29.05.2017 | Earth Sciences

New photocatalyst speeds up the conversion of carbon dioxide into chemical resources

29.05.2017 | Life Sciences

NASA's SDO sees partial eclipse in space

29.05.2017 | Physics and Astronomy

VideoLinks
B2B-VideoLinks
More VideoLinks >>>