Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Light wave measurements make circuits better

12.03.2004


Talk about precision. New measurements of key wavelengths of ultraviolet light — down to a few millionths of a nanometer — are among the most precise ever reported and are improving calibrations of microlithography tools used in making integrated circuits such as those in computer chips.



The dimensions involved are 10,000 times smaller than hydrogen atoms, the smallest of all atoms.

To make the measurements, physicists at the National Institute of Standards and Technology (NIST) used a spectrometer so sophisticated that it is one of only five of its kind in the world, two of which are at NIST. The spectrometer, which separates and detects specific wavelengths of light radiation, provides 10 times better resolution than similar instruments used in calibrations for highly demanding applications such as the Hubble Space Telescope. The work is reported in the February issue of the Journal of the Optical Society of America B.


The scientists measured the wavelengths of light emitted by excited atoms of iron, germanium and platinum. These elements are used as reference standards for calibrating argon flouride (ArF) excimer lasers, among the latest tools for printing integrated circuits on silicon wafers. ArF lasers are tunable over a range of approximately 0.7 nanometer (nm) centered at 193.4 nm. Precise calibration ensures that the laser light is focused properly to produce the desired circuit patterns. Improved calibrations are expected to help the semiconductor industry make circuits smaller.

The measurements were partially funded by Lambda Physik, a major supplier of lasers for microlithography applications. The results have been incorporated into commercial laser systems.

Laura Ost | EurekAlert!
Further information:
http://www.nist.gov/

More articles from Physics and Astronomy:

nachricht Extremely fine measurements of motion in orbiting supermassive black holes
28.06.2017 | Stanford University

nachricht Ultra-compact phase modulators based on graphene plasmons
27.06.2017 | ICFO-The Institute of Photonic Sciences

All articles from Physics and Astronomy >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Can we see monkeys from space? Emerging technologies to map biodiversity

An international team of scientists has proposed a new multi-disciplinary approach in which an array of new technologies will allow us to map biodiversity and the risks that wildlife is facing at the scale of whole landscapes. The findings are published in Nature Ecology and Evolution. This international research is led by the Kunming Institute of Zoology from China, University of East Anglia, University of Leicester and the Leibniz Institute for Zoo and Wildlife Research.

Using a combination of satellite and ground data, the team proposes that it is now possible to map biodiversity with an accuracy that has not been previously...

Im Focus: Climate satellite: Tracking methane with robust laser technology

Heatwaves in the Arctic, longer periods of vegetation in Europe, severe floods in West Africa – starting in 2021, scientists want to explore the emissions of the greenhouse gas methane with the German-French satellite MERLIN. This is made possible by a new robust laser system of the Fraunhofer Institute for Laser Technology ILT in Aachen, which achieves unprecedented measurement accuracy.

Methane is primarily the result of the decomposition of organic matter. The gas has a 25 times greater warming potential than carbon dioxide, but is not as...

Im Focus: How protons move through a fuel cell

Hydrogen is regarded as the energy source of the future: It is produced with solar power and can be used to generate heat and electricity in fuel cells. Empa researchers have now succeeded in decoding the movement of hydrogen ions in crystals – a key step towards more efficient energy conversion in the hydrogen industry of tomorrow.

As charge carriers, electrons and ions play the leading role in electrochemical energy storage devices and converters such as batteries and fuel cells. Proton...

Im Focus: A unique data centre for cosmological simulations

Scientists from the Excellence Cluster Universe at the Ludwig-Maximilians-Universität Munich have establised "Cosmowebportal", a unique data centre for cosmological simulations located at the Leibniz Supercomputing Centre (LRZ) of the Bavarian Academy of Sciences. The complete results of a series of large hydrodynamical cosmological simulations are available, with data volumes typically exceeding several hundred terabytes. Scientists worldwide can interactively explore these complex simulations via a web interface and directly access the results.

With current telescopes, scientists can observe our Universe’s galaxies and galaxy clusters and their distribution along an invisible cosmic web. From the...

Im Focus: Scientists develop molecular thermometer for contactless measurement using infrared light

Temperature measurements possible even on the smallest scale / Molecular ruby for use in material sciences, biology, and medicine

Chemists at Johannes Gutenberg University Mainz (JGU) in cooperation with researchers of the German Federal Institute for Materials Research and Testing (BAM)...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Plants are networkers

19.06.2017 | Event News

Digital Survival Training for Executives

13.06.2017 | Event News

Global Learning Council Summit 2017

13.06.2017 | Event News

 
Latest News

Extensive Funding for Research on Chromatin, Adrenal Gland, and Cancer Therapy

28.06.2017 | Awards Funding

Predicting eruptions using satellites and math

28.06.2017 | Earth Sciences

Extremely fine measurements of motion in orbiting supermassive black holes

28.06.2017 | Physics and Astronomy

VideoLinks
B2B-VideoLinks
More VideoLinks >>>