Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Siemens introduces point-of-use advanced oxidation system for TOC reduction in semiconductor applications

06.07.2009
Siemens has introduced an effective method for removing total organic carbon (TOC) in point-of-use (POU) ultrapure water treatment systems for semiconductor applications.

This proprietary advanced oxidation process, referred to as the VANOX POU system, will consistently reduce TOC to 0.5 parts per billion (ppb) and can treat seasonal TOC variations in feed water. This is important, since TOC elevations above 1.0 ppb can directly affect the manufacturing process, significantly impacting product yields.

Advanced oxidation produces hydroxyl radicals that attack and break down difficult organic compounds measured as TOC. Although advanced oxidation has been used in industrial applications for years, it had not been refined enough to minimize key contaminants and thus improve various tool applications. The Siemens VANOX POU system has made improvements in the reactor design, allowing reductions in power and capital costs and reductions in chemical use.

“The Siemens VANOX POU system creates a more effective radical for TOC reduction compared to common AOP processes,” said Bruce Coulter, Ultrapure Water Technical Manager for the Microelectronics Group at Siemens Water Technologies, “and it effectively removes troublesome organics such as urea, 2-propanol (IPA) and Trihalomethanes (THMs) found in semiconductor waters.”

The VANOX POU system will also deliver critical control temperature, low trace metal contaminates and reduce particles to less than 100 units per liter at .05 microns. The current industry standard for POU particle reduction is 200 to 500 units per liter.

VANOX is a trademark of Siemens and its affiliates in some countries.

Contact USA:
Karole Colangelo
Corporate Public Relations Manager
Siemens Water Technologies Corp.
2501 N. Barrington Road
Hoffman Estates, IL 60192
847-713-8458 phone
847-713-8469 fax
847-687-9630 cell
E-mail address karole.colangelo@siemens.com
The Siemens Industry Sector (Erlangen, Germany) is the world's leading supplier of production, transportation, building and lighting technologies. With integrated automation technologies as well as comprehensive industry-specific solutions, Siemens increases the productivity, efficiency and flexibility of its customers in the fields of industry and infrastructure. The Sector consists of six Divisions: Building Technologies, Drive Technologies, Industry Automation, Industry Solutions, Mobility and Osram. With around 222,000 employees worldwide Siemens Industry posted in fiscal year 2008 a profit of EUR3.86 billion with revenues totaling EUR38 billion.

With the business activities of Siemens VAI Metals Technologies, (Linz, Austria), Siemens Water Technologies (Warrendale, Pa., U.S.A.), and Industrial Technologies, (Erlangen, Germany), the Siemens Industry Solutions Division (Erlangen, Germany) is one of the world's leading solution and service providers for industrial and infrastructure facilities. Using its own products, systems and process technologies, Industry Solutions develops and builds plants for end customers, commissions them and provides support during their entire life cycle. With around 31,000 employees worldwide Siemens Industry Solutions achieved an order intake of EUR 8.415 billon in fiscal year 2008.

Dr. Rainer Schulze | Siemens Industry
Further information:
http://www.siemens.com/industry
http://www.siemens.com/water
http://www.siemens.com/industry-solutions

More articles from Power and Electrical Engineering:

nachricht Did you know that the wrapping of Easter eggs benefits from specialty light sources?
13.04.2017 | Heraeus Noblelight GmbH

nachricht To e-, or not to e-, the question for the exotic 'Si-III' phase of silicon
05.04.2017 | Carnegie Institution for Science

All articles from Power and Electrical Engineering >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Making lightweight construction suitable for series production

More and more automobile companies are focusing on body parts made of carbon fiber reinforced plastics (CFRP). However, manufacturing and repair costs must be further reduced in order to make CFRP more economical in use. Together with the Volkswagen AG and five other partners in the project HolQueSt 3D, the Laser Zentrum Hannover e.V. (LZH) has developed laser processes for the automatic trimming, drilling and repair of three-dimensional components.

Automated manufacturing processes are the basis for ultimately establishing the series production of CFRP components. In the project HolQueSt 3D, the LZH has...

Im Focus: Wonder material? Novel nanotube structure strengthens thin films for flexible electronics

Reflecting the structure of composites found in nature and the ancient world, researchers at the University of Illinois at Urbana-Champaign have synthesized thin carbon nanotube (CNT) textiles that exhibit both high electrical conductivity and a level of toughness that is about fifty times higher than copper films, currently used in electronics.

"The structural robustness of thin metal films has significant importance for the reliable operation of smart skin and flexible electronics including...

Im Focus: Deep inside Galaxy M87

The nearby, giant radio galaxy M87 hosts a supermassive black hole (BH) and is well-known for its bright jet dominating the spectrum over ten orders of magnitude in frequency. Due to its proximity, jet prominence, and the large black hole mass, M87 is the best laboratory for investigating the formation, acceleration, and collimation of relativistic jets. A research team led by Silke Britzen from the Max Planck Institute for Radio Astronomy in Bonn, Germany, has found strong indication for turbulent processes connecting the accretion disk and the jet of that galaxy providing insights into the longstanding problem of the origin of astrophysical jets.

Supermassive black holes form some of the most enigmatic phenomena in astrophysics. Their enormous energy output is supposed to be generated by the...

Im Focus: A Quantum Low Pass for Photons

Physicists in Garching observe novel quantum effect that limits the number of emitted photons.

The probability to find a certain number of photons inside a laser pulse usually corresponds to a classical distribution of independent events, the so-called...

Im Focus: Microprocessors based on a layer of just three atoms

Microprocessors based on atomically thin materials hold the promise of the evolution of traditional processors as well as new applications in the field of flexible electronics. Now, a TU Wien research team led by Thomas Müller has made a breakthrough in this field as part of an ongoing research project.

Two-dimensional materials, or 2D materials for short, are extremely versatile, although – or often more precisely because – they are made up of just one or a...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Fighting drug resistant tuberculosis – InfectoGnostics meets MYCO-NET² partners in Peru

28.04.2017 | Event News

Expert meeting “Health Business Connect” will connect international medical technology companies

20.04.2017 | Event News

Wenn der Computer das Gehirn austrickst

18.04.2017 | Event News

 
Latest News

Wireless power can drive tiny electronic devices in the GI tract

28.04.2017 | Medical Engineering

Ice cave in Transylvania yields window into region's past

28.04.2017 | Earth Sciences

Nose2Brain – Better Therapy for Multiple Sclerosis

28.04.2017 | Life Sciences

VideoLinks
B2B-VideoLinks
More VideoLinks >>>