This proprietary advanced oxidation process, referred to as the VANOX POU system, will consistently reduce TOC to 0.5 parts per billion (ppb) and can treat seasonal TOC variations in feed water. This is important, since TOC elevations above 1.0 ppb can directly affect the manufacturing process, significantly impacting product yields.
Advanced oxidation produces hydroxyl radicals that attack and break down difficult organic compounds measured as TOC. Although advanced oxidation has been used in industrial applications for years, it had not been refined enough to minimize key contaminants and thus improve various tool applications. The Siemens VANOX POU system has made improvements in the reactor design, allowing reductions in power and capital costs and reductions in chemical use.“The Siemens VANOX POU system creates a more effective radical for TOC reduction compared to common AOP processes,” said Bruce Coulter, Ultrapure Water Technical Manager for the Microelectronics Group at Siemens Water Technologies, “and it effectively removes troublesome organics such as urea, 2-propanol (IPA) and Trihalomethanes (THMs) found in semiconductor waters.”
The VANOX POU system will also deliver critical control temperature, low trace metal contaminates and reduce particles to less than 100 units per liter at .05 microns. The current industry standard for POU particle reduction is 200 to 500 units per liter.
VANOX is a trademark of Siemens and its affiliates in some countries.Contact USA:
With the business activities of Siemens VAI Metals Technologies, (Linz, Austria), Siemens Water Technologies (Warrendale, Pa., U.S.A.), and Industrial Technologies, (Erlangen, Germany), the Siemens Industry Solutions Division (Erlangen, Germany) is one of the world's leading solution and service providers for industrial and infrastructure facilities. Using its own products, systems and process technologies, Industry Solutions develops and builds plants for end customers, commissions them and provides support during their entire life cycle. With around 31,000 employees worldwide Siemens Industry Solutions achieved an order intake of EUR 8.415 billon in fiscal year 2008.
Robot on demand: Mobile machining of aircraft components with high precision
06.12.2016 | Fraunhofer IFAM
IHP presents the fastest silicon-based transistor in the world
05.12.2016 | IHP - Leibniz-Institut für innovative Mikroelektronik
In recent years, lasers with ultrashort pulses (USP) down to the femtosecond range have become established on an industrial scale. They could advance some applications with the much-lauded “cold ablation” – if that meant they would then achieve more throughput. A new generation of process engineering that will address this issue in particular will be discussed at the “4th UKP Workshop – Ultrafast Laser Technology” in April 2017.
Even back in the 1990s, scientists were comparing materials processing with nanosecond, picosecond and femtosesecond pulses. The result was surprising:...
Have you ever wondered how you see the world? Vision is about photons of light, which are packets of energy, interacting with the atoms or molecules in what...
A multi-institutional research collaboration has created a novel approach for fabricating three-dimensional micro-optics through the shape-defined formation of porous silicon (PSi), with broad impacts in integrated optoelectronics, imaging, and photovoltaics.
Working with colleagues at Stanford and The Dow Chemical Company, researchers at the University of Illinois at Urbana-Champaign fabricated 3-D birefringent...
In experiments with magnetic atoms conducted at extremely low temperatures, scientists have demonstrated a unique phase of matter: The atoms form a new type of quantum liquid or quantum droplet state. These so called quantum droplets may preserve their form in absence of external confinement because of quantum effects. The joint team of experimental physicists from Innsbruck and theoretical physicists from Hannover report on their findings in the journal Physical Review X.
“Our Quantum droplets are in the gas phase but they still drop like a rock,” explains experimental physicist Francesca Ferlaino when talking about the...
The Max Planck Institute for Physics (MPP) is opening up a new research field. A workshop from November 21 - 22, 2016 will mark the start of activities for an innovative axion experiment. Axions are still only purely hypothetical particles. Their detection could solve two fundamental problems in particle physics: What dark matter consists of and why it has not yet been possible to directly observe a CP violation for the strong interaction.
The “MADMAX” project is the MPP’s commitment to axion research. Axions are so far only a theoretical prediction and are difficult to detect: on the one hand,...
16.11.2016 | Event News
01.11.2016 | Event News
14.10.2016 | Event News
07.12.2016 | Health and Medicine
07.12.2016 | Life Sciences
07.12.2016 | Health and Medicine