Thanks to a series of highly successful projects in the EUREKA MEDEA+ Cluster, Europe leads the way in extreme ultraviolet (EUV) lithography for the production of future generations of semiconductor chips. As a result of strong co-operation between chipmakers, equipment suppliers and research centres, European companies will dominate the world market for equipment and materials. This is expected to generate some 18,000 jobs, mainly at a high technical level, as well as a €1 billion turnover by 2009.
Lithography plays a key role in the production of integrated circuits and now accounts for some 35% of the processing cost of silicon chips. It involves directing light through a photomask to project an image of the desired circuit onto the silicon semiconductor wafer covered with a light-resistant photoresist. As circuit details become smaller and smaller, the wavelength of the light has also reduced and is reaching the limits of the deep ultraviolet range. The solution for future generations of even smaller dimensioned circuits is the use of EUV with a wavelength of 13.5 nm, which are actually considered as soft X-rays.
Covering the main elements of the lithography process
Catherine Shiels | alfa
Next Generation Cryptography
20.03.2018 | Fraunhofer-Institut für Sichere Informationstechnologie SIT
TIB’s Visual Analytics Research Group to develop methods for person detection and visualisation
19.03.2018 | Technische Informationsbibliothek (TIB)
Satellites in near-Earth orbit are at risk due to the steady increase in space debris. But their mission in the areas of telecommunications, navigation or weather forecasts is essential for society. Fraunhofer FHR therefore develops radar-based systems which allow the detection, tracking and cataloging of even the smallest particles of debris. Satellite operators who have access to our data are in a better position to plan evasive maneuvers and prevent destructive collisions. From April, 25-29 2018, Fraunhofer FHR and its partners will exhibit the complementary radar systems TIRA and GESTRA as well as the latest radar techniques for space observation across three stands at the ILA Berlin.
The "traffic situation" in space is very tense: the Earth is currently being orbited not only by countless satellites but also by a large volume of space...
An international team of researchers has discovered a new anti-cancer protein. The protein, called LHPP, prevents the uncontrolled proliferation of cancer cells in the liver. The researchers led by Prof. Michael N. Hall from the Biozentrum, University of Basel, report in “Nature” that LHPP can also serve as a biomarker for the diagnosis and prognosis of liver cancer.
The incidence of liver cancer, also known as hepatocellular carcinoma, is steadily increasing. In the last twenty years, the number of cases has almost doubled...
In just a few weeks from now, the Chinese space station Tiangong-1 will re-enter the Earth's atmosphere where it will to a large extent burn up. It is possible that some debris will reach the Earth's surface. Tiangong-1 is orbiting the Earth uncontrolled at a speed of approx. 29,000 km/h.Currently the prognosis relating to the time of impact currently lies within a window of several days. The scientists at Fraunhofer FHR have already been monitoring Tiangong-1 for a number of weeks with their TIRA system, one of the most powerful space observation radars in the world, with a view to supporting the German Space Situational Awareness Center and the ESA with their re-entry forecasts.
Following the loss of radio contact with Tiangong-1 in 2016 and due to the low orbital height, it is now inevitable that the Chinese space station will...
Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, provider of research and development services for OLED lighting solutions, announces the founding of the “OLED Licht Forum” and presents latest OLED design and lighting solutions during light+building, from March 18th – 23rd, 2018 in Frankfurt a.M./Germany, at booth no. F91 in Hall 4.0.
They are united in their passion for OLED (organic light emitting diodes) lighting with all of its unique facets and application possibilities. Thus experts in...
A new scenario seeking to explain how Mars' putative oceans came and went over the last 4 billion years implies that the oceans formed several hundred million...
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