Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Innovative RF-magnetron sputtering process creates homogenous BaTiO3 films for high-tech electronics

18.11.2005


Microstructural characterization of BaTiO3 thin films prepared by RF-Magnetron sputtering using sintered targets from high energy ball milled powders



The electronic and optical characteristics of barium titanate (BT) ferroelectric ceramics are of great interest for industrial uses and when grown as thin films they can easily be integrated into modern circuitry. These thin films are commonly prepared by RF- magnetron sputtering using a commercially available BT target as the material source.

The problem with using commercial BT-targets is that they fracture during the cathodic erosion, causing heterogeneities in subsequent film deposition procedures.


In this study, published in AZojomo*, by V. Torres-Heredia, J. Muñoz-Saldaña, F. J. Espinoza Beltrán, A. Márquez Herrera and A. Zapata Navarro from Unidad Querétaro and Unidad Altamira, BaTiO3-thin films were prepared by RF-sputtering using low temperature sintered BT-targets from powders processed by high energy ball milling. The films were deposited onto silicon (Si(111)) substrates coated with indium tin oxide (ITO), where the ITO thin film acts as an electrode. Furthermore, structure and microstructural characterization of the nanocrystalline BT thin films was reported.

Results indicated that the low BT sintering temperatures (950°C) produced the best microstructural properties of the target such as submicrometric grain size (~260 nm). This in turn lead to a high degree of densification and homogeneity. The microstructure of the resultant film was found to be strongly dependent on the annealing temperature, which also influenced internal stresses and the crystalline structure of the film.

Dr. Ian Birkby | EurekAlert!
Further information:
http://www.azonetwork.com
http://www.azom.com/oars.asp
http://www.azom.com/azojomo.asp

More articles from Materials Sciences:

nachricht Decoding cement's shape promises greener concrete
08.12.2016 | Rice University

nachricht Scientists track chemical and structural evolution of catalytic nanoparticles in 3-D
08.12.2016 | DOE/Brookhaven National Laboratory

All articles from Materials Sciences >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Electron highway inside crystal

Physicists of the University of Würzburg have made an astonishing discovery in a specific type of topological insulators. The effect is due to the structure of the materials used. The researchers have now published their work in the journal Science.

Topological insulators are currently the hot topic in physics according to the newspaper Neue Zürcher Zeitung. Only a few weeks ago, their importance was...

Im Focus: Significantly more productivity in USP lasers

In recent years, lasers with ultrashort pulses (USP) down to the femtosecond range have become established on an industrial scale. They could advance some applications with the much-lauded “cold ablation” – if that meant they would then achieve more throughput. A new generation of process engineering that will address this issue in particular will be discussed at the “4th UKP Workshop – Ultrafast Laser Technology” in April 2017.

Even back in the 1990s, scientists were comparing materials processing with nanosecond, picosecond and femtosesecond pulses. The result was surprising:...

Im Focus: Shape matters when light meets atom

Mapping the interaction of a single atom with a single photon may inform design of quantum devices

Have you ever wondered how you see the world? Vision is about photons of light, which are packets of energy, interacting with the atoms or molecules in what...

Im Focus: Novel silicon etching technique crafts 3-D gradient refractive index micro-optics

A multi-institutional research collaboration has created a novel approach for fabricating three-dimensional micro-optics through the shape-defined formation of porous silicon (PSi), with broad impacts in integrated optoelectronics, imaging, and photovoltaics.

Working with colleagues at Stanford and The Dow Chemical Company, researchers at the University of Illinois at Urbana-Champaign fabricated 3-D birefringent...

Im Focus: Quantum Particles Form Droplets

In experiments with magnetic atoms conducted at extremely low temperatures, scientists have demonstrated a unique phase of matter: The atoms form a new type of quantum liquid or quantum droplet state. These so called quantum droplets may preserve their form in absence of external confinement because of quantum effects. The joint team of experimental physicists from Innsbruck and theoretical physicists from Hannover report on their findings in the journal Physical Review X.

“Our Quantum droplets are in the gas phase but they still drop like a rock,” explains experimental physicist Francesca Ferlaino when talking about the...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

ICTM Conference 2017: Production technology for turbomachine manufacturing of the future

16.11.2016 | Event News

Innovation Day Laser Technology – Laser Additive Manufacturing

01.11.2016 | Event News

#IC2S2: When Social Science meets Computer Science - GESIS will host the IC2S2 conference 2017

14.10.2016 | Event News

 
Latest News

Researchers identify potentially druggable mutant p53 proteins that promote cancer growth

09.12.2016 | Life Sciences

Scientists produce a new roadmap for guiding development & conservation in the Amazon

09.12.2016 | Ecology, The Environment and Conservation

Satellites, airport visibility readings shed light on troops' exposure to air pollution

09.12.2016 | Health and Medicine

VideoLinks
B2B-VideoLinks
More VideoLinks >>>