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Low Frequency Plasma Generator: 29 kHz Innovation by Frankfurt Scientists

Frankfurt scientists have designed an inductively coupled plasma generator with an operating frequency of only 29 kHz. The emitted light spectra had a high UV-component and electron densities of more than 1015 cm-3 were achieved during a discharge sequence.

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INNOVECTIS Gesellschaft für Innovations-Dienstleistungen mbH
Phone: +49 (0)69/798-49721

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Dr. Otmar Schöller

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