Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

A global first: Heraeus black.infrared increases efficiency of heating processes for semiconductor production

05.09.2018

SEMICON Taiwan 2018: A new infrared emitter design optimizes homogeneous heating processes under ultrapure vacuum conditions, with applications in photovoltaics and glass coatings

At the SEMICON Taiwan exhibition in Taipei at the beginning of September, Heraeus Noblelight will present black.infrared, a global first for the semiconductor and photovoltaics industry. The innovative infrared system functions according to a completely new emitter principle.


Heraeus black.infrared Application Glass Manufacturing

The flat, low-profile emitter is surrounded by quartz glass material, e.g. a specially developed quartz glass, and this combination helps transfer infrared heat very homogenously at a high energy density. This makes heating processes more efficient in both space and energy.

Wherever space is short and fast, homogenous heating is required, switching to black.infrared can significantly shorten process times and considerably improve quality, such as in microchip production.

The emitters are also suited for ultrapure processes and vacuum conditions. In contrast to conventional ceramic and metal emitters, the process can minimize impurities during wafer production. Rolf Diehl, Vice President of Heraeus Noblelight explains:

“Black.infrared was developed with the demanding requirements of semiconductor production and photovoltaics in mind. This combination of design and emitter technology is a revolutionary breakthrough for efficient, ultrapure heating processes under vacuum conditions.”

Innovation is particularly interesting for the semiconductor industry

Semiconductor process technology requires multiple thermal processes that dry or heat during the production of microchips, such as those used in smartphones. It is important in this process to avoid both chemical impurities in the microchips and particles from entering during the individual production process steps.

Even the tiniest trace impurities during manufacturing will result in a defective microchip, which is then unusable. The new Heraeus emitters use a specially developed quartz glass as a carrier material. Due to its high chemical purity (it consists solely of silicon and oxygen), it is optimally suited for these thermal processes. Black.infrared emitters have been constructed to allow for the greatest possible homogeneity at relatively close proximity. That helps to use the process space optimally.

Tests and development projects have shown that the new combination’s very high homogeneity and optimally adjusted emitters can contribute to greater energy efficiency. “The black.infrared emitter combines an infrared emitter in the medium wave range of around 2.5 micrometers with high optical performance for the first time. This combination is unique,” says Rolf Diehl.

In the future, additional industrial heating processes could also benefit from new infrared systems given that infrared emitters with medium wavelengths are particularly suited for glass, plastic and most coatings.

Heraeus Holding GmbH
Heraeusstr. 12 - 14
63450 Hanau
Germany
Phone: +49 (0) 6181/35-0
Fax: +49 (0) 6181/35-31 31
E-Mail: pr@heraeus.com

Markus Bulgrin | Heraeus Holding GmbH
Further information:
http://www.heraeus.com

More articles from Trade Fair News:

nachricht Start to the year for medical exhibitions: international high-tech companies meet at MD&M West
17.01.2019 | IVAM Fachverband für Mikrotechnik

nachricht Innovative Infrared heat reduces energy consumption in coating packaging for food
12.12.2018 | Heraeus Noblelight GmbH

All articles from Trade Fair News >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Ten-year anniversary of the Neumayer Station III

The scientific and political community alike stress the importance of German Antarctic research

Joint Press Release from the BMBF and AWI

The Antarctic is a frigid continent south of the Antarctic Circle, where researchers are the only inhabitants. Despite the hostile conditions, here the Alfred...

Im Focus: Ultra ultrasound to transform new tech

World first experiments on sensor that may revolutionise everything from medical devices to unmanned vehicles

The new sensor - capable of detecting vibrations of living cells - may revolutionise everything from medical devices to unmanned vehicles.

Im Focus: Flying Optical Cats for Quantum Communication

Dead and alive at the same time? Researchers at the Max Planck Institute of Quantum Optics have implemented Erwin Schrödinger’s paradoxical gedanken experiment employing an entangled atom-light state.

In 1935 Erwin Schrödinger formulated a thought experiment designed to capture the paradoxical nature of quantum physics. The crucial element of this gedanken...

Im Focus: Nanocellulose for novel implants: Ears from the 3D-printer

Cellulose obtained from wood has amazing material properties. Empa researchers are now equipping the biodegradable material with additional functionalities to produce implants for cartilage diseases using 3D printing.

It all starts with an ear. Empa researcher Michael Hausmann removes the object shaped like a human ear from the 3D printer and explains:

Im Focus: Elucidating the Atomic Mechanism of Superlubricity

The phenomenon of so-called superlubricity is known, but so far the explanation at the atomic level has been missing: for example, how does extremely low friction occur in bearings? Researchers from the Fraunhofer Institutes IWM and IWS jointly deciphered a universal mechanism of superlubricity for certain diamond-like carbon layers in combination with organic lubricants. Based on this knowledge, it is now possible to formulate design rules for supra lubricating layer-lubricant combinations. The results are presented in an article in Nature Communications, volume 10.

One of the most important prerequisites for sustainable and environmentally friendly mobility is minimizing friction. Research and industry have been dedicated...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

VideoLinks
Industry & Economy
Event News

Our digital society in 2040

16.01.2019 | Event News

11th International Symposium: “Advanced Battery Power – Kraftwerk Batterie” Aachen, 3-4 April 2019

14.01.2019 | Event News

ICTM Conference 2019: Digitization emerges as an engineering trend for turbomachinery construction

12.12.2018 | Event News

 
Latest News

Additive manufacturing reflects fundamental metallurgical principles to create materials

18.01.2019 | Materials Sciences

How molecules teeter in a laser field

18.01.2019 | Life Sciences

The cytoskeleton of neurons has been found to be involved in Alzheimer's disease

18.01.2019 | Health and Medicine

VideoLinks
Science & Research
Overview of more VideoLinks >>>