Hybrid Plasma-Laser Micro-Structuring of Fused Silica
Hybrid plasma-laser micro-structuring provides a tool for treating fused silica without the need for a time consuming preconditioning of the surface or the use of expensive vacuum-UV- respectively mid-wavelength-IR-lasers. The use of a hydrogenous plasma prior to the ablation process causes a temporary increase of the absorption in a more easily accessible wavelength region.
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