For two-dimensional film thickness determination, a measurement system based on a hyperspectral imager has been developed for the first time. A head forms a measurement line. Reflection of the measurement object is displayed on the entrance slit of the hyperspectral imager. From the spectral reflectance data of each locally resolvable pixel of the examined object the layer height is reconstructed. If the measurement object is moving uniformly, combined measurement lines are resulting in a two-dimensional measuring surface. In addition, for each locally resolvable pixel the distance between head and measurement object can be determined.
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