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Ionisation manometer for the measurement of UHV/XHV pressures in cryogenic vacuum systems

05.10.2016

Our novel concept of a pressure measurement using an ionisation manometer with decoupled electron source is based on the idea to maintain the classical, well-established geometry of hot cathode ionisation manometers for UHV/XHV, but to remove the heat-generating filament and to relocate the electron generation for the gauge into the room-temperature environment, where heat generation does not disturb. This innovative solution was mainly developed for UHV/XHV pressure measurements under cryogenic conditions. However, it may be easily applied in any vacuum installations which are operated e.g. under high or medium vacuum and higher temperatures.

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