iENA Silver Medal for Observer of Atoms

Alex Huaman receiving the iENA Silver Medal for the IMMS precision positioning system.

Alex Huaman (IMMS, center) on 12.12.2024 at the Thuringian award ceremony of the PATON | State Patent Center Thuringia at the Technical University of Ilmenau in the competition of the inventors' fair iENA at the presentation of the silver medal by Sascha Erfurt (PATON, left) and Mr. Könicke (iENA, right). Photo: IMMS.

In the field of precision engineering and mechatronics systems, novel innovations shape the future of technologies like nano-fabrication technology and high-precision devices.

Honoring Excellence: The IMMS Patent

6D sub-nanometer planar positioning system demonstrating disturbance compensation.
The inventor Alex Huaman was elected on 12.12.2024 for the IMMS patent “Positioning system with a controller and method for its configuration” at the Thuringian award event of the PATON | State Patent Center Thuringia at the Technical University of Ilmenau honored with a silver medal in the competition of the inventors’ fair iENA. Photo: IMMS.

Recently, the IMMS patent, titled “Positioning system with a controller and method for its configuration”, was honored at the Thuringian award event of PATON | State Patent Center Thuringia at the Technical University of Ilmenau awarded with a silver medal in the competition of the inventors’ fair iENA. By October end, PATON had submitted the work to the iENA competition in Nuremberg on behalf of the inventor Alex Huaman.

Why do you have to work more precisely than nanometers?

Today, technical products such as smartphones and medical devices are becoming increasingly miniaturized. In many industrial sectors, accurate machines are sought after due to the increased need to measure and process the smallest structures and objects with high precision. These machines have a dual functionality of positioning objects to the nanometer in a short span with a lot more precision in perspective. Comparatively, they also function in large working areas of several hundred millimeters. Transported to other dimensions, you could get into a rocket in Peru, enter the target coordinates of the parking lot at IMMS, take off, and quickly and safely hit the targeted parking space, as long as it is only 60 cm wider than the rocket.

The innovative control concept was developed for high-dynamic multi-coordinate direct drive systems and validated on the 6D nanometer planar positioning system shown in the video. Source: IMMS.

Novel control concept for highly dynamic multi-coordinate direct drive systems

Highly dynamic multi-coordinate direct drive systems, such as those developed at IMMS make such accurate work possible. These systems function in a closed control loop. Consequentially, a complex control algorithm calculates new target values for the drives based on measurement data on the actual state of the positioning slide.

The newly established control concept with extended dynamic observer enables effective compensation of disturbances. Hence, it significantly increases drive precision in dynamic operation.

Considering the depth of this new approach, perturbing forces do not have to be precisely measured in order to be compensated. Additionally, the control system adapts to long-term changes in the faults.

Observer-based regulation system for multi-coordinate positioning at IMMS.
The IMMS patent for a new control concept for sub-nanometer positioning was awarded a silver medal at the iENA Inventors’ Fair 2024. The image shows the 6D nanometer planar positioning system used to validate the concept. Photo: IMMS.

A new fault estimator enables compensation of disturbances

Keeping in mind accuracy, the innovative control concept was developed for a nanometer-precise drive system with three drive and guide elements. Replicating a tripod, these elements generate vertical movements while tilting around the horizontal spatial axes. In addition to the aerostatic guide, each of these three elements contains two actuators moving in parallel, generating and transmitting a vertical force to the moving part. To reduce system complexity, these coupled individual axes are each implemented with single-axis controllers with the above-mentioned properties.

The newest addition to the control concept is the disturbance estimator. It estimates the forces and moments that interrupt the system in real time, hence, promoting a proactive nature. With these calculated disturbances, the regulator can be used to compensate for the actual interference forces. This can offset crosstalk between the axes and faults and counteract interference from the environment as well as from the internal system.

Prioritizing Precision Engineering

The IMMS sub-nanometer positioning system is a testament to what’s possible when state-of-the-art technology meets visionary ingenuity. With its recognition at iENA and its potential to revolutionize industries, this system symbolizes the future of precision engineering. Whether in nano-fabrication technology, medical advancements, or precision optics, this breakthrough demonstrates that miniscule movements can have the most significant impacts.

 

Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
Email: ludwig.herzog(at)imms.de
Phone Number: +49 (0) 3677 874 93 60

Original Publication
Article Title: Tip and Laser-Based 3D Nanofabrication in Extended Macroscopic Workspaces 

Media Contact
Beate Hövelmans
Head of Corporate Communications
Phone Number: +49.3677.87493.13
Email ID: beate.hoevelmans@imms.de
Website address: www.imms.de

Media Contact

Beate Hövelmans

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