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Inexpensive method to create a smooth Silicon Carbide-surface on Silicon-wafers

26.04.2010
Silicon Carbide is e.g. used as a substrate for the epitaxial growth of e.g. Gallium Nitride which is used for light-emitting diodes and blue laser. Silicon Carbide wafers, however, are much more expensive than silicon wafers; and silicon carbide surfaces that have been grown on cheap silicon wafers usually show a huge warpage. The invention describes an inexpensive way to create a smooth and high-quality silicon carbide surface on silicon-wafers with state-of-the-art CMOS compatible process.

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