Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

IMEC increases performance of high-k metal gate planar CMOS and FinFETs

13.12.2007
At today’s IEEE International Electron Devices Meeting, IMEC reports significant progress in improving the performance of planar CMOS using hafnium-based high-k dielectrics and tantalum-carbide metal gates targeting the 32nm CMOS node.

Low threshold voltage (Vt) is achieved by applying a thin dielectric cap between the gate dielectric and metal gate. In addition, the use of laser-only annealing for gate stack engineering resulted in a significant reduction of the minimum sustainable gate length and improved short-channel effect control. The same processes were applied on FinFETs and resulted in a possible candidate technology for the 22nm node.

A major challenge in using high-k dielectrics for CMOS devices is the high threshold voltage resulting in low performance. Dual metal gates in combination with dual dielectrics can solve this problem but have the drawback that extra processing steps are required resulting in a higher processing cost. IMEC developed a simpler, lower-cost integration scheme using only one dielectric stack and one metal. A thin dielectric cap is deposited between the gate dielectric and metal gate which effectively modulates the work function towards the optimal operating zone. Laser anneal instead of spike anneal is applied to reduce the effective oxide thickness. Using laser-only annealing higher activated and shallow junctions could be achieved.

Both a lanthanium- (La2O3) and dysprosium-based (Dy2O3) capping layer was used for nMOS and an aluminum-based capping layer for pMOS. Symmetric low Vt of +/-0.25V were achieved and drive currents of 1035µA/µm and 505µA/µm for nMOS and pMOS respectively at VDD of 1.1V and Ioff of 100nA/µm. Successful CMOS integration was illustrated by a ring oscillator delay of less than 15ps.

Since thin gate dielectrics suffer from soft breakdown before the specified lifetime and the failure is difficult to forecast, IMEC developed a time-dependent dielectric breakdown model to completely predict the reliability of the devices. The model is based on the statistical analysis of hard breakdown including multiple soft breakdown and wear out. By applying the model on the high-k/metal gate devices, the excellent quality of the gate dielectrics has been demonstrated.

In strong collaboration with NXP and TSMC, excellent performance (drive current of 950µA/µm and Ioff of 50nA/µm at VDD of 1V for nMOS FinFETs) and short channel effect control were achieved for tall, narrow FinFETs without mobility enhancement. Physical vapor deposition (PVD) and atomic layer deposition (ALD) were compared as metal deposition technique. Since PVD metals are denser and less porous, PVD of titanium nitride (TiN) electrodes on hafnium oxide (HfO2) dielectrics gave improved nMOS performance compared to ALD TiN. IMEC also applied the dysprosium-based (Dy2O3) capping process on FinFETs resulting in a possible candidate technology for the 22nm node.

These results were obtained in collaboration with IMEC’s (sub-)32nm CMOS core partners including Infineon, Qimonda, Intel, Micron, NXP, Panasonic, Samsung, STMicroelectronics, Texas Instruments and TSMC, and IMEC’s key CMOS partners including Elpida and Hynix.

Katrien Marent | alfa
Further information:
http://www.imec.be/wwwinter/mediacenter/en/IEEE2007.shtml

More articles from Physics and Astronomy:

nachricht A two-atom quantum duet
12.11.2018 | Institute for Basic Science

nachricht Improving understanding of how the Solar System is formed
12.11.2018 | Goethe-Universität Frankfurt am Main

All articles from Physics and Astronomy >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: A Leap Into Quantum Technology

Faster and secure data communication: This is the goal of a new joint project involving physicists from the University of Würzburg. The German Federal Ministry of Education and Research funds the project with 14.8 million euro.

In our digital world data security and secure communication are becoming more and more important. Quantum communication is a promising approach to achieve...

Im Focus: Research icebreaker Polarstern begins the Antarctic season

What does it look like below the ice shelf of the calved massive iceberg A68?

On Saturday, 10 November 2018, the research icebreaker Polarstern will leave its homeport of Bremerhaven, bound for Cape Town, South Africa.

Im Focus: Penn engineers develop ultrathin, ultralight 'nanocardboard'

When choosing materials to make something, trade-offs need to be made between a host of properties, such as thickness, stiffness and weight. Depending on the application in question, finding just the right balance is the difference between success and failure

Now, a team of Penn Engineers has demonstrated a new material they call "nanocardboard," an ultrathin equivalent of corrugated paper cardboard. A square...

Im Focus: Coping with errors in the quantum age

Physicists at ETH Zurich demonstrate how errors that occur during the manipulation of quantum system can be monitored and corrected on the fly

The field of quantum computation has seen tremendous progress in recent years. Bit by bit, quantum devices start to challenge conventional computers, at least...

Im Focus: Nanorobots propel through the eye

Scientists developed specially coated nanometer-sized vehicles that can be actively moved through dense tissue like the vitreous of the eye. So far, the transport of nano-vehicles has only been demonstrated in model systems or biological fluids, but not in real tissue. The work was published in the journal Science Advances and constitutes one step further towards nanorobots becoming minimally-invasive tools for precisely delivering medicine to where it is needed.

Researchers of the “Micro, Nano and Molecular Systems” Lab at the Max Planck Institute for Intelligent Systems in Stuttgart, together with an international...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

VideoLinks
Industry & Economy
Event News

“3rd Conference on Laser Polishing – LaP 2018” Attracts International Experts and Users

09.11.2018 | Event News

On the brain’s ability to find the right direction

06.11.2018 | Event News

European Space Talks: Weltraumschrott – eine Gefahr für die Gesellschaft?

23.10.2018 | Event News

 
Latest News

In focus: Peptides, the “little brothers and sisters” of proteins

12.11.2018 | Life Sciences

Materials scientist creates fabric alternative to batteries for wearable devices

12.11.2018 | Materials Sciences

A two-atom quantum duet

12.11.2018 | Physics and Astronomy

VideoLinks
Science & Research
Overview of more VideoLinks >>>