Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Distribution of Fraunhofer IISB Lithography Simulation Software

05.12.2007
Starting from 2008, Fraunhofer IISB will market its advanced and proven lithography simulation models and software algorithms in its development and research simulator Dr.LiTHO. The software can be purchased from Fraunhofer IISB. The cooperation with SIGMA-C, now part of Synopsys, will no longer be continued.

The Fraunhofer IISB lithography simulation software will be distributed as the Dr.LiTHO [1, 2] software package. Dr.LiTHO was formerly used as the internal development and research lithography simulator of Fraunhofer IISB and can now be purchased from this institute. This direct approach to market replaces the collaboration with SIGMA-C. Following the acquisition of SIGMA-C by Synopsys, Synopsys and Fraunhofer IISB could not reach a new agreement on the terms for continuing the cooperation.

The Munich-based software house SIGMA-C has been the sales partner for the simulation algorithms developed by Fraunhofer. As frequently published during this long-lasting cooperation between Fraunhofer IISB and SIGMA-C, important kernel algorithms of the established lithography simulators SOLID-C, SOLID-EUV, and SOLID-E were developed at Fraunhofer IISB. This, among others, includes FDTD [3] and the Waveguide Method [4] for the rigorous simulation of light diffraction from optical masks and extensions thereof for the modeling of EUV masks [3], for lithographic exposures over topography [5], and decomposition techniques for the fast rigorous simulation of larger mask areas [6].

The Fraunhofer software Dr.LiTHO includes revised and optimized versions of the Waveguide Method for the rigorous simulation of mask diffraction effects, mesoscopic models for the description of line edge roughness (LER), and several interfaces for the coupling of lithography simulation flows with external academic or commercial simulators, in addition to standard simulation models which were also included in SOLID-E.

Dr.LiTHO employs a user concept based on the modern programming language Python. This approach offers wide portability, various methods for parallelization, easy-to-use visualization components, and much more [1, 2]. Dr.LiTHO can be easily adapted to the modeling of alternative lithography techniques such as interference exposures, near field lithography, and/or contact and proximity printing. Optionally, Dr.LiTHO can be combined with the advanced optimization tools of Fraunhofer IISB [1]. Additional capabilities and interfaces will be added to Dr.LiTHO through future research and development.

In the future, the advanced lithography simulation algorithms of Fraunhofer IISB will also be combined and commercialized in combination with various simulation and metrology tools of academic research groups and commercial suppliers. New developments in the distribution of the IISB simulation software, including strategic alliances, will be published on our web site [1]

and on appropriate occasions elsewhere.

A user group will be established to support the industrial application and further development of Dr.LiTHO. Fraunhofer IISB will support members of this user group to adapt the simulation algorithms of Dr.LiTHO to their specific purpose. The requirements as defined by the user group will have a strong impact on the further development of Dr.LiTHO, both for "traditional applications" of lithography simulation in projection printing for semiconductor fabrication and for alternative lithographic technologies and areas of application.

The Fraunhofer IISB lithography simulation group has a long-standing history in lithography simulation. Almost 20 years ago Wolfgang Henke, at that time at Fraunhofer IMT, started to develop algorithms for the simulation of lithographic projection printing processes [7]. Today, the lithography simulation group of Fraunhofer IISB led by Andreas Erdmann employs 8 scientists and PhD students with various backgrounds in physics/optics, electrical engineering, and computer science.

[1] www.drlitho.com.
[2] T. Fühner, T. Schnattinger, G. Ardelean, and A. Erdmann: "Dr.LiTHO - a development and research lithography simulator", Proc. SPIE 6520 (2007) 65203F-1
[3] A. Vial, A. Erdmann, T. Schmöller, and C.K. Kalus: "Modification of boundaries conditions in the FDTD algorithm for EUV masks modelling", Proc. SPIE 4754 (2002) 890
[4] A. Erdmann and P. Evanschitzky: "Rigorous mask modeling using waveguide and FDTD methods", SIGMA-C User Workshop Japan, 21. April, 2006
P. Evanschitzky and A. Erdmann: "Fast near field simulation of optical and EUV masks using the Waveguide Method", Proc. of SPIE 6533 (2007) 65530Y
[5] A. Erdmann, C.K. Kalus, T. Schmöller, Y. Klyonova, T. Sato, A. Endo, T. Shibata, and Y. Kobayashi: "Rigorous simulation of exposure over nonplanar wafers", Proc. SPIE 5040 (2003) 101
[6] A. Erdmann, C.K. Kalus, T. Schmöller, and A. Wolter: "Efficient simulation of light diffraction from 3-dimensional EUV-masks using field decomposition techniques", Proc. SPIE 5037 (2003) 482

[7] W. Henke, R. Schwalm, M. Weiss, and J. Pelka: "Diffraction effects in submicron contact/proximity printing", Microelectronic Engineering 10 (1989)

Fraunhofer Institute of
Integrated Systems and
Device Technology (IISB)
Lithography Simulation
Dr. Andreas Erdmann
Phone +49 (0) 9131 761-258
Fax +49 (0) 9131 761-212
dr.litho@iisb.fraunhofer.de

Dr. Andreas Erdmann | Fraunhofer-Gesellschaft
Further information:
http://www.drlitho.com
http://www.iisb.fraunhofer.de

More articles from Information Technology:

nachricht Research alliance: TRUMPF and Fraunhofer IPA ramping up artificial intelligence for industrial use
06.08.2020 | Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA

nachricht Novel approach improves graphene-based supercapacitors
03.08.2020 | University of Technology Sydney

All articles from Information Technology >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: ScanCut project completed: laser cutting enables more intricate plug connector designs

Scientists at the Fraunhofer Institute for Laser Technology ILT have come up with a striking new addition to contact stamping technologies in the ERDF research project ScanCut. In collaboration with industry partners from North Rhine-Westphalia, the Aachen-based team of researchers developed a hybrid manufacturing process for the laser cutting of thin-walled metal strips. This new process makes it possible to fabricate even the tiniest details of contact parts in an eco-friendly, high-precision and efficient manner.

Plug connectors are tiny and, at first glance, unremarkable – yet modern vehicles would be unable to function without them. Several thousand plug connectors...

Im Focus: New Strategy Against Osteoporosis

An international research team has found a new approach that may be able to reduce bone loss in osteoporosis and maintain bone health.

Osteoporosis is the most common age-related bone disease which affects hundreds of millions of individuals worldwide. It is estimated that one in three women...

Im Focus: AI & single-cell genomics

New software predicts cell fate

Traditional single-cell sequencing methods help to reveal insights about cellular differences and functions - but they do this with static snapshots only...

Im Focus: TU Graz Researchers synthesize nanoparticles tailored for special applications

“Core-shell” clusters pave the way for new efficient nanomaterials that make catalysts, magnetic and laser sensors or measuring devices for detecting electromagnetic radiation more efficient.

Whether in innovative high-tech materials, more powerful computer chips, pharmaceuticals or in the field of renewable energies, nanoparticles – smallest...

Im Focus: Tailored light inspired by nature

An international research team with Prof. Cornelia Denz from the Institute of Applied Physics at the University of Münster develop for the first time light fields using caustics that do not change during propagation. With the new method, the physicists cleverly exploit light structures that can be seen in rainbows or when light is transmitted through drinking glasses.

Modern applications as high resolution microsopy or micro- or nanoscale material processing require customized laser beams that do not change during...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

VideoLinks
Industry & Economy
Event News

“Conference on Laser Polishing – LaP 2020”: The final touches for surfaces

23.07.2020 | Event News

Conference radar for cybersecurity

21.07.2020 | Event News

Contact Tracing Apps against COVID-19: German National Academy Leopoldina hosts international virtual panel discussion

07.07.2020 | Event News

 
Latest News

Rare Earth Elements in Norwegian Fjords?

06.08.2020 | Earth Sciences

Anode material for safe batteries with a long cycle life

06.08.2020 | Power and Electrical Engineering

Turning carbon dioxide into liquid fuel

06.08.2020 | Life Sciences

VideoLinks
Science & Research
Overview of more VideoLinks >>>