Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Photoresists for 157nm Exposure Technology

11.06.2003


Infineon Technologies (FSE/NYSE: IFX) and Clariant Corporation’s AZ Electronic Materials business (Somerville, N.J., USA) have signed an agreement to jointly develop photoresists for 157 nm exposure technology. The goal is to accelerate qualification of this technology for volume production.



The photoresist materials to be developed in this project will specifically enable Infineon to qualify the 157 nm technology for producing 55 nm structures in DRAM (dynamic random access memory) semiconductor chip production.

The International Technology Roadmap for Semiconductors, which describes the technology and materials needed for future chip generations, predicts that 55 nm structures will be in volume production beginning in 2007. One of the mainstream candidate technologies for achieving these dimensions is 157 nm lithography, a technology that uses fluorine molecular lasers emitting at the vacuum ultraviolet wavelength of 157 nm.


To accelerate the photoresist development work, the companies will draw upon their joint chemical research and development capabilities and use Infineon’s most advanced lithographic equipment in Dresden, Germany. Infineon will have one of the earliest exposure tools available for 157 nm pilot production. Wilhelm Beinvogl, Infineon’s chief technology officer for memory products, says early access to such a tool is integral to accelerating the material and process development.

“Because of the research and development capabilities and advanced processing equipment that this development project brings together, our companies are confident we can help make 157 nm photoresist available for the timely introduction of the 55 nm node,” says Clariant’s Dr. Ralph Dammel, director of technology for 193 nm and 157 nm products.

Photoresists are light-sensitive materials that define the small patterns on the various layers of an integrated circuit. Lithographic technologies have evolved rapidly over the past few decades. Currently lithography at the 193 nm wavelength of light is entering volume production. The 193 nm wavelength has been introduced at Infineon to define sub-130 nm patterns. The157 nm wavelength is predicted to be the final usable optical wavelength. It is also predicted that non-optical “Next Generation Lithography” methods will be needed to produce even smaller structures. The 157 nm technology bridges the gap between 193 nm and Next Generation Lithography.

About Clariant AZ Electronic Materials

The AZ Electronic Materials business of Clariant is a worldwide leader in electronic materials for the semiconductor, recording head, and flat panel display markets. Clariant AZ Electronic Materials provides a total customer solution with a broad line of photoresists, antireflective coatings, developers, ancillary chemicals, dielectric materials, and polyimides. Clariant is a global leader in the production of fine and specialty chemicals with some 29,000 employees and annual sales of about CHF 10 billion. The Group operates worldwide with more than 100 companies on five continents. It is domiciled and headquartered in Muttenz near Basel/Switzerland. The products and services of the five divisions Textile, Leather & Paper Chemicals, Pigments & Additives, Masterbatches, Functional Chemicals and Life Science & Electronic Chemicals are based on innovative specialty chemicals. These play a decisive role in the clients’ manufacturing processes and upgrade their end products.

About Infineon

Infineon Technologies AG, Munich, Germany, offers semiconductor and system solutions for the automotive and industrial sectors, for applications in the wired communications markets, secure mobile solutions as well as memory products. With a global presence, Infineon operates in the US from San Jose, CA, in the Asia-Pacific region from Singapore and in Japan from Tokyo. In fiscal year 2002 (ending September), the company achieved sales of Euro 5.21 billion with about 30,400 employees worldwide. Infineon is listed on the DAX index of the Frankfurt Stock Exchange and on the New York Stock Exchange (ticker symbol: IFX).

Contacts at Clariant
157 nm Technology Contact
Dr. Ralph Dammel
E-mail: ralph.dammel@clariant.com

Reiner Schoenrock | Infineon Technologies AG
Further information:
http://www.clariant.com
http://www.azresist.com
http://www.infineon.com

More articles from Information Technology:

nachricht Multifunctional e-glasses monitor health, protect eyes, control video game
28.05.2020 | American Chemical Society

nachricht Researchers incorporate computer vision and uncertainty into AI for robotic prosthetics
28.05.2020 | North Carolina State University

All articles from Information Technology >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Biotechnology: Triggered by light, a novel way to switch on an enzyme

In living cells, enzymes drive biochemical metabolic processes enabling reactions to take place efficiently. It is this very ability which allows them to be used as catalysts in biotechnology, for example to create chemical products such as pharmaceutics. Researchers now identified an enzyme that, when illuminated with blue light, becomes catalytically active and initiates a reaction that was previously unknown in enzymatics. The study was published in "Nature Communications".

Enzymes: they are the central drivers for biochemical metabolic processes in every living cell, enabling reactions to take place efficiently. It is this very...

Im Focus: New double-contrast technique picks up small tumors on MRI

Early detection of tumors is extremely important in treating cancer. A new technique developed by researchers at the University of California, Davis offers a significant advance in using magnetic resonance imaging to pick out even very small tumors from normal tissue. The work is published May 25 in the journal Nature Nanotechnology.

researchers at the University of California, Davis offers a significant advance in using magnetic resonance imaging to pick out even very small tumors from...

Im Focus: I-call - When microimplants communicate with each other / Innovation driver digitization - "Smart Health“

Microelectronics as a key technology enables numerous innovations in the field of intelligent medical technology. The Fraunhofer Institute for Biomedical Engineering IBMT coordinates the BMBF cooperative project "I-call" realizing the first electronic system for ultrasound-based, safe and interference-resistant data transmission between implants in the human body.

When microelectronic systems are used for medical applications, they have to meet high requirements in terms of biocompatibility, reliability, energy...

Im Focus: When predictions of theoretical chemists become reality

Thomas Heine, Professor of Theoretical Chemistry at TU Dresden, together with his team, first predicted a topological 2D polymer in 2019. Only one year later, an international team led by Italian researchers was able to synthesize these materials and experimentally prove their topological properties. For the renowned journal Nature Materials, this was the occasion to invite Thomas Heine to a News and Views article, which was published this week. Under the title "Making 2D Topological Polymers a reality" Prof. Heine describes how his theory became a reality.

Ultrathin materials are extremely interesting as building blocks for next generation nano electronic devices, as it is much easier to make circuits and other...

Im Focus: Rolling into the deep

Scientists took a leukocyte as the blueprint and developed a microrobot that has the size, shape and moving capabilities of a white blood cell. Simulating a blood vessel in a laboratory setting, they succeeded in magnetically navigating the ball-shaped microroller through this dynamic and dense environment. The drug-delivery vehicle withstood the simulated blood flow, pushing the developments in targeted drug delivery a step further: inside the body, there is no better access route to all tissues and organs than the circulatory system. A robot that could actually travel through this finely woven web would revolutionize the minimally-invasive treatment of illnesses.

A team of scientists from the Max Planck Institute for Intelligent Systems (MPI-IS) in Stuttgart invented a tiny microrobot that resembles a white blood cell...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

VideoLinks
Industry & Economy
Event News

Dresden Nexus Conference 2020: Same Time, Virtual Format, Registration Opened

19.05.2020 | Event News

Aachen Machine Tool Colloquium AWK'21 will take place on June 10 and 11, 2021

07.04.2020 | Event News

International Coral Reef Symposium in Bremen Postponed by a Year

06.04.2020 | Event News

 
Latest News

Black nitrogen: Bayreuth researchers discover new high-pressure material and solve a puzzle of the periodic table

29.05.2020 | Materials Sciences

Argonne researchers create active material out of microscopic spinning particles

29.05.2020 | Materials Sciences

Smart windows that self-illuminate on rainy days

29.05.2020 | Power and Electrical Engineering

VideoLinks
Science & Research
Overview of more VideoLinks >>>