Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Cooking up new mems: a taste of microscopic machines to come

21.12.2007
Microelectromechanical systems (MEMS) are tiny components etched from silicon. Production is extremely complex, sometimes with hundreds of steps, each with dozens of parameters. One European project has developed software that can test, simulate, track and share new manufacturing processes. It could slash development times and pave the way for innovative MEMS designs.

If you could shrink yourself smaller than a dust mite and explore the innards of a modern car you would discover some amazing microscopic machines. Carefully etched out of silicon wafers are microscale accelerometers to trigger airbags, gyroscopes to detect and correct dangerous yaw and pressure sensors to monitor tyre inflation.

The automotive industry is one of the biggest consumers of microelectromechanical systems (MEMS). These tiny components marry the worlds of electronics and mechanics. Using the same manufacturing principles employed to produce microchips, it is possible to etch silicon into electrical devices with moving parts.

MEMS manufacturing is extremely complex, involving sometimes hundreds of different steps. Each step may be controlled by a dozen or more parameters, including temperatures, pressures and chemical compositions.

“Trying to come up with a manufacturing recipe for a new MEMS component is so complicated it would be impossible without ICT support. You just couldn't keep up with all the variables and their impact on the final outcome,” explains Dirk Ortloff, co-originator of the EU-funded Promenade project.

A difference of five degrees Celsius may have little effect on the production of silicon chips because they only depend on the electrical properties of the material. MEMS, however, also have mechanical properties. A small variation in any manufacturing parameter at any step could alter the performance of the final product.

Promenade brings together some of the foremost experts in process development for MEMS devices. The project consisted of seven partners, including industry, research institutes, universities and software vendors, from Belgium, the UK, the Netherlands, Germany and Austria.

Virtual manufacturing
The aim of the project was to build software that could support the design of MEMS manufacturing sequences.

Working closely with Bosch and the centre IMEC research centre as potential end users, the research partners focused on three modules. The design module lets manufacturers input and edit the sequence of manufacturing steps using a graphical interface. The module can really cut down development time by performing consistency checks on the assembled process flow. These checks help to avoid common errors like wrong or forgotten pre- or post-processing.

Each step and its related parameters and other data are stored in a database in a standardised format. Ortloff says this is an important breakthrough for the MEMS industry. “Currently it is not possible to transfer complex MEMS recipes together with their support data electronically. By making this information available in a standard format it will be much quicker for manufacturers to transfer the information and to set up fabrication in different units.”

The second module allows designers to simulate the manufacturing sequence. This module is based on a commercially available simulation package by Silvaco, one of the project partners. Development work within the project has adapted Silvaco's software to account for the physical structure of MEMS. Reliable simulations are essential for MEMS designs so that as many problems can be ironed out prior to expensive experimental and prototype production.

The final module developed by the Promenade consortium is a tracking component that documents the entire manufacturing process – every parameter of every step, along with images and scans of the device.

“Capturing experimental data is routine in the industry,” says Ortloff, “but there is no system that captures all of it, then organises the data in a way that finds the relations between the data. We help to turn all the data into knowledge and, again, speed up the development process because you don't need to gather all the knowledge again every time you design a new MEMS.”

Etching out new markets
The project’s results have been welcomed by MEMS manufacturers and several commercial products will be made available. Silvaco will offer a tool for full three-dimensional process flow simulation analysis, incorporating models for MEMS processing.

What's more, Promenade team members at Cavendish Kinetics and the University of Siegen have started a new spin-off company, called Process Relations Gmbh. The start-up has already completed its first round of funding and is approaching a second round as it prepares the worldwide launch of Promenade's commercial successor, named XperiDesk.

XperiDesk will provide the first-ever process development and execution system (PDES) in the area of microelectronics and MEMS, and later also for other high-tech industries like solar and bio-medical equipment manufacturers. Ortloff estimates the market for PDE-systems at €100 million per year.

“XperiDesk will really speed up process development and the transfer of the processes, perhaps by two or more weeks for any one transfer,” says Ortloff. “It also will allow novel devices and ideas to be tested and taken into development, whereas previously they would have been cancelled because no one could work out how to make them. For high-tech companies with their fast product lifecycles, this can be a real competitive advantage.”

Who knows what magnificent machines you might soon discover exploring the insides of that automobile?

Christian Nielsen | alfa
Further information:
http://cordis.europa.eu/ictresults/index.cfm/section/news/tpl/article/BrowsingType/Features/ID/89367

More articles from Information Technology:

nachricht Next stop Morocco: EU partners test innovative space robotics technologies in the Sahara desert
09.11.2018 | Deutsches Forschungszentrum für Künstliche Intelligenz GmbH, DFKI

nachricht A burst of ”synchronous” light
08.11.2018 | Empa - Eidgenössische Materialprüfungs- und Forschungsanstalt

All articles from Information Technology >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: A Leap Into Quantum Technology

Faster and secure data communication: This is the goal of a new joint project involving physicists from the University of Würzburg. The German Federal Ministry of Education and Research funds the project with 14.8 million euro.

In our digital world data security and secure communication are becoming more and more important. Quantum communication is a promising approach to achieve...

Im Focus: Research icebreaker Polarstern begins the Antarctic season

What does it look like below the ice shelf of the calved massive iceberg A68?

On Saturday, 10 November 2018, the research icebreaker Polarstern will leave its homeport of Bremerhaven, bound for Cape Town, South Africa.

Im Focus: Penn engineers develop ultrathin, ultralight 'nanocardboard'

When choosing materials to make something, trade-offs need to be made between a host of properties, such as thickness, stiffness and weight. Depending on the application in question, finding just the right balance is the difference between success and failure

Now, a team of Penn Engineers has demonstrated a new material they call "nanocardboard," an ultrathin equivalent of corrugated paper cardboard. A square...

Im Focus: Coping with errors in the quantum age

Physicists at ETH Zurich demonstrate how errors that occur during the manipulation of quantum system can be monitored and corrected on the fly

The field of quantum computation has seen tremendous progress in recent years. Bit by bit, quantum devices start to challenge conventional computers, at least...

Im Focus: Nanorobots propel through the eye

Scientists developed specially coated nanometer-sized vehicles that can be actively moved through dense tissue like the vitreous of the eye. So far, the transport of nano-vehicles has only been demonstrated in model systems or biological fluids, but not in real tissue. The work was published in the journal Science Advances and constitutes one step further towards nanorobots becoming minimally-invasive tools for precisely delivering medicine to where it is needed.

Researchers of the “Micro, Nano and Molecular Systems” Lab at the Max Planck Institute for Intelligent Systems in Stuttgart, together with an international...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

VideoLinks
Industry & Economy
Event News

“3rd Conference on Laser Polishing – LaP 2018” Attracts International Experts and Users

09.11.2018 | Event News

On the brain’s ability to find the right direction

06.11.2018 | Event News

European Space Talks: Weltraumschrott – eine Gefahr für die Gesellschaft?

23.10.2018 | Event News

 
Latest News

In focus: Peptides, the “little brothers and sisters” of proteins

12.11.2018 | Life Sciences

Materials scientist creates fabric alternative to batteries for wearable devices

12.11.2018 | Materials Sciences

A two-atom quantum duet

12.11.2018 | Physics and Astronomy

VideoLinks
Science & Research
Overview of more VideoLinks >>>