Inexpensive method to create a smooth Silicon Carbide-surface on Silicon-wafers
Silicon Carbide is e.g. used as a substrate for the epitaxial growth of e.g. Gallium Nitride which is used for light-emitting diodes and blue laser. Silicon Carbide wafers, however, are much more expensive than silicon wafers; and silicon carbide surfaces that have been grown on cheap silicon wafers usually show a huge warpage. The invention describes an inexpensive way to create a smooth and high-quality silicon carbide surface on silicon-wafers with state-of-the-art CMOS compatible process.
Further Information: PDF
Bayerische Patentallianz GmbH
Phone: +49 89 5480177-0
Contact
Peer Biskup
Media Contact
All latest news from the category: Technology Offerings
Newest articles
High-energy-density aqueous battery based on halogen multi-electron transfer
Traditional non-aqueous lithium-ion batteries have a high energy density, but their safety is compromised due to the flammable organic electrolytes they utilize. Aqueous batteries use water as the solvent for…
First-ever combined heart pump and pig kidney transplant
…gives new hope to patient with terminal illness. Surgeons at NYU Langone Health performed the first-ever combined mechanical heart pump and gene-edited pig kidney transplant surgery in a 54-year-old woman…
Biophysics: Testing how well biomarkers work
LMU researchers have developed a method to determine how reliably target proteins can be labeled using super-resolution fluorescence microscopy. Modern microscopy techniques make it possible to examine the inner workings…
