New data from the National Institute of Standards and Technology (NIST) will assist in the design of optics for liquid immersion lithography, an old idea that recently has attracted new interest as a possible means of improving image resolution and thereby shrinking feature sizes of computer chips.
Conventional optical lithography has advanced sufficiently to achieve a resolution of 100 nanometers (billionths of a meter), but there are physical and technical limits to how much better it can get. By placing certain liquids between the final optical element and the silicon wafer, it may be possible to extend the resolution to 65 nanometers for state-of-the-art lithography using the 193-nanometer wavelength of light, or even 45 nanometers or below for future systems using the 157-nanometer wavelength.
A key characteristic of liquids to be used in immersion lithography is their refractive index, which affects how light bends as it crosses an interface, such as that between the liquid and a lens or a silicon wafer. Air has an index close to one. By contrast, water has a refractive index almost 50 percent higher. Placing this higher-index fluid between the lens and the silicon wafer reduces the resolution-limiting effects of diffraction, enabling imaging of smaller feature sizes.
Laura Ost | EurekAlert!
Quick, Precise, but not Cold
17.05.2017 | Fraunhofer-Institut für Lasertechnik ILT
A laser for divers
03.05.2017 | Laser Zentrum Hannover e.V.
The world's highest gain high power laser amplifier - by many orders of magnitude - has been developed in research led at the University of Strathclyde.
The researchers demonstrated the feasibility of using plasma to amplify short laser pulses of picojoule-level energy up to 100 millijoules, which is a 'gain'...
Staphylococcus aureus is a feared pathogen (MRSA, multi-resistant S. aureus) due to frequent resistances against many antibiotics, especially in hospital infections. Researchers at the Paul-Ehrlich-Institut have identified immunological processes that prevent a successful immune response directed against the pathogenic agent. The delivery of bacterial proteins with RNA adjuvant or messenger RNA (mRNA) into immune cells allows the re-direction of the immune response towards an active defense against S. aureus. This could be of significant importance for the development of an effective vaccine. PLOS Pathogens has published these research results online on 25 May 2017.
Staphylococcus aureus (S. aureus) is a bacterium that colonizes by far more than half of the skin and the mucosa of adults, usually without causing infections....
Physicists from the University of Würzburg are capable of generating identical looking single light particles at the push of a button. Two new studies now demonstrate the potential this method holds.
The quantum computer has fuelled the imagination of scientists for decades: It is based on fundamentally different phenomena than a conventional computer....
An international team of physicists has monitored the scattering behaviour of electrons in a non-conducting material in real-time. Their insights could be beneficial for radiotherapy.
We can refer to electrons in non-conducting materials as ‘sluggish’. Typically, they remain fixed in a location, deep inside an atomic composite. It is hence...
Two-dimensional magnetic structures are regarded as a promising material for new types of data storage, since the magnetic properties of individual molecular building blocks can be investigated and modified. For the first time, researchers have now produced a wafer-thin ferrimagnet, in which molecules with different magnetic centers arrange themselves on a gold surface to form a checkerboard pattern. Scientists at the Swiss Nanoscience Institute at the University of Basel and the Paul Scherrer Institute published their findings in the journal Nature Communications.
Ferrimagnets are composed of two centers which are magnetized at different strengths and point in opposing directions. Two-dimensional, quasi-flat ferrimagnets...
24.05.2017 | Event News
23.05.2017 | Event News
22.05.2017 | Event News
29.05.2017 | Earth Sciences
29.05.2017 | Life Sciences
29.05.2017 | Physics and Astronomy