Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

New Laser Technique Advances Nanofabrication Process

14.04.2009
University of Maryland chemistry Professor John Fourkas and his research group have developed a new laser technique called RAPID (Resolution Augmentation through Photo-Induced Deactivation) lithography that creates ever smaller computer chip features without the use of expensive ultraviolet light.

The ability to create tiny patterns is essential to the fabrication of computer chips and many other current and potential applications of nanotechnology.

Yet, creating ever smaller features, through a widely-used process called photolithography, has required the use of ultraviolet light, which is difficult and expensive to work with. John Fourkas, Professor of Chemistry and Biochemistry in the University of Maryland College of Chemical and Life Sciences, and his research group have developed a new, table-top technique called RAPID (Resolution Augmentation through Photo-Induced Deactivation) lithography that makes it possible to create small features without the use of ultraviolet light. This research is to be published in Science magazine and released on Science Express on April 9, 2009.

Photolithography uses light to deposit or remove material and create patterns on a surface. There is usually a direct relationship between the wavelength of light used and the feature size created. Therefore, nanofabrication has depended on short wavelength ultraviolet light to generate ever smaller features.

"The RAPID lithography technique we have developed enables us to create patterns twenty times smaller than the wavelength of light employed,” explains Dr. Fourkas, "which means that it streamlines the nanofabrication process. We expect RAPID to find many applications in areas such as electronics, optics, and biomedical devices.”

"If you have gotten a filling at the dentist in recent years,” says Fourkas, "you have seen that a viscous liquid is squirted into the cavity and a blue light is then used to harden it. A similar process of hardening using light is the first element of RAPID. Now imagine that your dentist could use a second light source to sculpt the filling by preventing it from hardening in certain places. We have developed a way of using a second light source to perform this sculpting, and it allows us to create features that are 2500 times smaller than the width of a human hair.” Both of the laser light sources used by Fourkas and his team were of the same color, the only difference being that the laser used to harden the material produced short bursts of light while the laser used to prevent hardening was on constantly. The second laser beam also passed through a special optic that allowed for sculpting of the hardened features in the desired shape.

"The fact that one laser is on constantly in RAPID makes this technique particularly easy to implement,” says Fourkas, "because there is no need to control the timing between two different pulsed lasers.”

Fourkas and his team are currently working on improvements to RAPID lithography that they believe will make it possible to create features that are half of the size of the ones they have demonstrated to date.

Achieving lambda/20 Resolution by One-Color Initiation and Deactivation of Polymerization was written by Linjie Li, Rafael R. Gattass, Erez Gershgorem, Hana Hwang and John T. Fourkas.

Kelly Blake | Newswise Science News
Further information:
http://www.umd.edu

More articles from Process Engineering:

nachricht Quick, Precise, but not Cold
17.05.2017 | Fraunhofer-Institut für Lasertechnik ILT

nachricht A laser for divers
03.05.2017 | Laser Zentrum Hannover e.V.

All articles from Process Engineering >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Exotic quantum states made from light: Physicists create optical “wells” for a super-photon

Physicists at the University of Bonn have managed to create optical hollows and more complex patterns into which the light of a Bose-Einstein condensate flows. The creation of such highly low-loss structures for light is a prerequisite for complex light circuits, such as for quantum information processing for a new generation of computers. The researchers are now presenting their results in the journal Nature Photonics.

Light particles (photons) occur as tiny, indivisible portions. Many thousands of these light portions can be merged to form a single super-photon if they are...

Im Focus: Circular RNA linked to brain function

For the first time, scientists have shown that circular RNA is linked to brain function. When a RNA molecule called Cdr1as was deleted from the genome of mice, the animals had problems filtering out unnecessary information – like patients suffering from neuropsychiatric disorders.

While hundreds of circular RNAs (circRNAs) are abundant in mammalian brains, one big question has remained unanswered: What are they actually good for? In the...

Im Focus: RAVAN CubeSat measures Earth's outgoing energy

An experimental small satellite has successfully collected and delivered data on a key measurement for predicting changes in Earth's climate.

The Radiometer Assessment using Vertically Aligned Nanotubes (RAVAN) CubeSat was launched into low-Earth orbit on Nov. 11, 2016, in order to test new...

Im Focus: Scientists shine new light on the “other high temperature superconductor”

A study led by scientists of the Max Planck Institute for the Structure and Dynamics of Matter (MPSD) at the Center for Free-Electron Laser Science in Hamburg presents evidence of the coexistence of superconductivity and “charge-density-waves” in compounds of the poorly-studied family of bismuthates. This observation opens up new perspectives for a deeper understanding of the phenomenon of high-temperature superconductivity, a topic which is at the core of condensed matter research since more than 30 years. The paper by Nicoletti et al has been published in the PNAS.

Since the beginning of the 20th century, superconductivity had been observed in some metals at temperatures only a few degrees above the absolute zero (minus...

Im Focus: Scientists improve forecast of increasing hazard on Ecuadorian volcano

Researchers from the University of Miami (UM) Rosenstiel School of Marine and Atmospheric Science, the Italian Space Agency (ASI), and the Instituto Geofisico--Escuela Politecnica Nacional (IGEPN) of Ecuador, showed an increasing volcanic danger on Cotopaxi in Ecuador using a powerful technique known as Interferometric Synthetic Aperture Radar (InSAR).

The Andes region in which Cotopaxi volcano is located is known to contain some of the world's most serious volcanic hazard. A mid- to large-size eruption has...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Call for Papers – ICNFT 2018, 5th International Conference on New Forming Technology

16.08.2017 | Event News

Sustainability is the business model of tomorrow

04.08.2017 | Event News

Clash of Realities 2017: Registration now open. International Conference at TH Köln

26.07.2017 | Event News

 
Latest News

New thruster design increases efficiency for future spaceflight

16.08.2017 | Physics and Astronomy

Transporting spin: A graphene and boron nitride heterostructure creates large spin signals

16.08.2017 | Materials Sciences

A new method for the 3-D printing of living tissues

16.08.2017 | Interdisciplinary Research

VideoLinks
B2B-VideoLinks
More VideoLinks >>>