Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Fraunhofer FEP introduces arcPECVD: A novel roll-to-roll PECVD process with very high coating rates

11.06.2013
Layers can be deposited in a highly productive way at a coating rate of more than 2000 nm ∙ m/min with the newly developed arcPECVD process. Potential fields of application are layer systems with optical functionalities or permeation barriers on polymer films.
Scientists at the Fraunhofer Institute for Electron Beam and Plasma Technology FEP have developed a novel vacuum coating process which in addition to the existing vacuum processes such as magnetron sputtering and high-rate evaporation makes the deposition of new layer systems and materials with very high coating rates possible.

In the hollow cathode arc PECVD process (short: arcPECVD) a reactive gas, such as hexamethyldisiloxane (HMDSO), enters the reaction chamber and is effectively excited, ionized and decomposed by means of hollow cathode arc plasma. Through this process a siliceous layer is deposited on the substrate. Depending on the process parameters comparatively soft and elastic plasma polymeric layers but also inorganic, more rigid and dense layers can be achieved.

Highly productive vacuum coating process of Fraunhofer FEP

For instance, in order to build a permeation barrier usually a layer stack is used, where a relatively thick, elastic smoothening layer is embedded in between the actual functional layers. So far, hitherto existing PECVD processes have not been feasible enough for the deposition of these interlayers due to their low coating rates. As alternatives lacquering processes have been used, which however require the transfer out off and back into the vacuum chamber. With the arcPECVD process a tool is now available, which is predestined for these applications and which can be applied in-line with other PVD processes.

The process, which is carried out at the low pressure of 0.1 … 5 Pa, can be effortlessly combined in a coating system with other PVD processes such as magnetron sputtering or electron beam deposition. This makes it possible to apply entire layer stacks in-line in only one vacuum run in roll-to-roll systems: this results in enormous savings in terms of time and money. The arcPECVD process was developed at the Fraunhofer FEP using the institute’s very own plasma sources and demonstrates good process stability. During a coating time of more than 2.5 hours, a constantly high coating rate of 2000 nm ∙ m/min ± 1.5 % could be achieved.

The Fraunhofer FEP’s hollow cathode plasma sources have already been approved in the industrial sector. They have been in use in the production of packaging films in widths of up to 2.85 meters for the past five years.

Dr. Steffen Günther, a specialist for PECVD processes at Fraunhofer FEP, sees enormous application potential for the arcPECVD: “We have already been able to show that PECVD layers are able to significantly reduce the layer stress in optical layer stacks. I see a great potential for example in the combination of the arcPECVD with the electron beam deposition of titanium oxide which would allow the highly productive – and as a result cost-effective – production of optical layer systems. Other application areas are permeation barriers for photovoltaic modules and organic electronics. The arcPECVD process is ready and waiting to be adapted to specific layer and customer demands within the framework of joint development projects with partners from both the industrial and research sectors.”
More information can be found under:
http://www.fep.fraunhofer.de

Press contact:
Annett Arnold, M.Sc.
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
Phone +49 351 2586-452
annett.arnold@fep.fraunhofer.de
Winterbergstraße 28 | 01277 Dresden | Gemany | www.fep.fraunhofer.de

Annett Arnold | Fraunhofer-Institut
Further information:
http://www.fep.fraunhofer.de

More articles from Process Engineering:

nachricht Quick, Precise, but not Cold
17.05.2017 | Fraunhofer-Institut für Lasertechnik ILT

nachricht A laser for divers
03.05.2017 | Laser Zentrum Hannover e.V.

All articles from Process Engineering >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Can the immune system be boosted against Staphylococcus aureus by delivery of messenger RNA?

Staphylococcus aureus is a feared pathogen (MRSA, multi-resistant S. aureus) due to frequent resistances against many antibiotics, especially in hospital infections. Researchers at the Paul-Ehrlich-Institut have identified immunological processes that prevent a successful immune response directed against the pathogenic agent. The delivery of bacterial proteins with RNA adjuvant or messenger RNA (mRNA) into immune cells allows the re-direction of the immune response towards an active defense against S. aureus. This could be of significant importance for the development of an effective vaccine. PLOS Pathogens has published these research results online on 25 May 2017.

Staphylococcus aureus (S. aureus) is a bacterium that colonizes by far more than half of the skin and the mucosa of adults, usually without causing infections....

Im Focus: A quantum walk of photons

Physicists from the University of Würzburg are capable of generating identical looking single light particles at the push of a button. Two new studies now demonstrate the potential this method holds.

The quantum computer has fuelled the imagination of scientists for decades: It is based on fundamentally different phenomena than a conventional computer....

Im Focus: Turmoil in sluggish electrons’ existence

An international team of physicists has monitored the scattering behaviour of electrons in a non-conducting material in real-time. Their insights could be beneficial for radiotherapy.

We can refer to electrons in non-conducting materials as ‘sluggish’. Typically, they remain fixed in a location, deep inside an atomic composite. It is hence...

Im Focus: Wafer-thin Magnetic Materials Developed for Future Quantum Technologies

Two-dimensional magnetic structures are regarded as a promising material for new types of data storage, since the magnetic properties of individual molecular building blocks can be investigated and modified. For the first time, researchers have now produced a wafer-thin ferrimagnet, in which molecules with different magnetic centers arrange themselves on a gold surface to form a checkerboard pattern. Scientists at the Swiss Nanoscience Institute at the University of Basel and the Paul Scherrer Institute published their findings in the journal Nature Communications.

Ferrimagnets are composed of two centers which are magnetized at different strengths and point in opposing directions. Two-dimensional, quasi-flat ferrimagnets...

Im Focus: World's thinnest hologram paves path to new 3-D world

Nano-hologram paves way for integration of 3-D holography into everyday electronics

An Australian-Chinese research team has created the world's thinnest hologram, paving the way towards the integration of 3D holography into everyday...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Marine Conservation: IASS Contributes to UN Ocean Conference in New York on 5-9 June

24.05.2017 | Event News

AWK Aachen Machine Tool Colloquium 2017: Internet of Production for Agile Enterprises

23.05.2017 | Event News

Dortmund MST Conference presents Individualized Healthcare Solutions with micro and nanotechnology

22.05.2017 | Event News

 
Latest News

How herpesviruses win the footrace against the immune system

26.05.2017 | Life Sciences

Water forms 'spine of hydration' around DNA, group finds

26.05.2017 | Life Sciences

First Juno science results supported by University of Leicester's Jupiter 'forecast'

26.05.2017 | Physics and Astronomy

VideoLinks
B2B-VideoLinks
More VideoLinks >>>