Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Aluminum nitride coatings by atmospheric reactive plasma spray

24.09.2012
Aluminum nitride (AlN) has a high thermal conductivity, low thermal expansion (similar to silicon) and exhibits high resistance to halogen plasma. These remarkable properties of AlN are exploited in heat sinks and semiconductor manufacturing equipment, such as chemical vapor deposition reaction vessels and electrical components.

For such applications fabrication of thick AlN coating by thermal spray into the chosen material surface considered to be suitable solution. However, it is impossible to fabricate AlN coating directly by conventional thermal spraying due to the AlN thermal decomposition without melting.


SEM cross section images of the AlN coatings fabricated with using N2 plasma gas flow rate of: (a) 100, (b) 120, (c) 160 l/min and (d-f) are higher magnifications of the squared parts in (a-c).

Here, Mohammed Shahien and colleagues at Toyohashi University of Technology, Japan report on the realization of cubic AlN coatings on steel substrates by atmospheric reactive plasma spraying of fine Al2O3 feedstock powder in N2/H2 plasma.

The formation process was clarified thus, during spray the particles melted, spheroidized and nitrided in the plasma to form the cubic aluminum oxynitride then cubic-AlN. Furthermore, using smaller particle size enhanced the surface (reaction) area and improved the nitriding conversion.

It was possible to fabricate thick and uniform coatings with high AlN content by spraying fine Al2O3/AlN mixture and the thickness increased from about 150 µm to about 200 µm with increasing the N2 gas flow rate from 100 to 160 l/min.

These results are important for the manufacture of high performance equipment for the materials manufacturing including semiconductors.

Reference

Authors: M. Shahien, M. Yamada, T. Yasui, M. Fukumoto
Title of paper: Aluminum Nitride Coating Fabricated by Reactive Plasma Spraying of Al2O3
Journal: Proceedings of Thermal Spray 2012: Proceedings from the International Thermal Spray Conference and Exposition.May 21–24, 2012, Houston, Texas, USA. Pages: 873-879.

Affiliation: Interface & Surface Fabrication Laboratory, Department of Mechanical Engineering

| Toyohashi Tech e-Newsletter
Further information:
http://www.tut.ac.jp/
http://isf.me.tut.ac.jp/english/E_index.html
http://www.tut.ac.jp/english/newsletter/research_highlights/research04.html

More articles from Process Engineering:

nachricht Quick, Precise, but not Cold
17.05.2017 | Fraunhofer-Institut für Lasertechnik ILT

nachricht A laser for divers
03.05.2017 | Laser Zentrum Hannover e.V.

All articles from Process Engineering >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Fizzy soda water could be key to clean manufacture of flat wonder material: Graphene

Whether you call it effervescent, fizzy, or sparkling, carbonated water is making a comeback as a beverage. Aside from quenching thirst, researchers at the University of Illinois at Urbana-Champaign have discovered a new use for these "bubbly" concoctions that will have major impact on the manufacturer of the world's thinnest, flattest, and one most useful materials -- graphene.

As graphene's popularity grows as an advanced "wonder" material, the speed and quality at which it can be manufactured will be paramount. With that in mind,...

Im Focus: Exotic quantum states made from light: Physicists create optical “wells” for a super-photon

Physicists at the University of Bonn have managed to create optical hollows and more complex patterns into which the light of a Bose-Einstein condensate flows. The creation of such highly low-loss structures for light is a prerequisite for complex light circuits, such as for quantum information processing for a new generation of computers. The researchers are now presenting their results in the journal Nature Photonics.

Light particles (photons) occur as tiny, indivisible portions. Many thousands of these light portions can be merged to form a single super-photon if they are...

Im Focus: Circular RNA linked to brain function

For the first time, scientists have shown that circular RNA is linked to brain function. When a RNA molecule called Cdr1as was deleted from the genome of mice, the animals had problems filtering out unnecessary information – like patients suffering from neuropsychiatric disorders.

While hundreds of circular RNAs (circRNAs) are abundant in mammalian brains, one big question has remained unanswered: What are they actually good for? In the...

Im Focus: RAVAN CubeSat measures Earth's outgoing energy

An experimental small satellite has successfully collected and delivered data on a key measurement for predicting changes in Earth's climate.

The Radiometer Assessment using Vertically Aligned Nanotubes (RAVAN) CubeSat was launched into low-Earth orbit on Nov. 11, 2016, in order to test new...

Im Focus: Scientists shine new light on the “other high temperature superconductor”

A study led by scientists of the Max Planck Institute for the Structure and Dynamics of Matter (MPSD) at the Center for Free-Electron Laser Science in Hamburg presents evidence of the coexistence of superconductivity and “charge-density-waves” in compounds of the poorly-studied family of bismuthates. This observation opens up new perspectives for a deeper understanding of the phenomenon of high-temperature superconductivity, a topic which is at the core of condensed matter research since more than 30 years. The paper by Nicoletti et al has been published in the PNAS.

Since the beginning of the 20th century, superconductivity had been observed in some metals at temperatures only a few degrees above the absolute zero (minus...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Call for Papers – ICNFT 2018, 5th International Conference on New Forming Technology

16.08.2017 | Event News

Sustainability is the business model of tomorrow

04.08.2017 | Event News

Clash of Realities 2017: Registration now open. International Conference at TH Köln

26.07.2017 | Event News

 
Latest News

A Map of the Cell’s Power Station

18.08.2017 | Life Sciences

Engineering team images tiny quasicrystals as they form

18.08.2017 | Physics and Astronomy

Researchers printed graphene-like materials with inkjet

18.08.2017 | Materials Sciences

VideoLinks
B2B-VideoLinks
More VideoLinks >>>