Advanced plasma-based etching is a key enabler of Moore's Law that observes that the number of transistors on integrated circuits doubles nearly every two years. It is the plasma's ability to reproduce fine patterns on silicon that makes this scaling possible and has made plasma sources ubiquitous in microchip manufacturing.
A plasma wave can give rise to a population of suprathermal electrons. Credit: I.D. Kaganovich and D. Sydorenko
A groundbreaking fabrication technique, based on what is called a DC-augmented capacitively coupled plasma source, affords chip makers unprecedented control of the plasma. This process enables DC-electrode borne electron beams to reach and harden the surface of the mask that is used for printing the microchip circuits. More importantly, the presence of the beam creates a population of suprathermal electrons in the plasma, producing the plasma chemistry that is necessary to protect the mask. The energy of these electrons is greater than simple thermal heating could produce—hence the name "suprathermal." But how the beam electrons transform themselves into this suprathermal population has been a puzzle.
Now a computer simulation developed at the U.S. Department of Energy's Princeton
Plasma Physics Laboratory in collaboration with the University of Alberta has shed light on this transformation. The simulation reveals that the initial DC-electrode borne beam generates intense plasma waves that move through the plasma like ripples in water. And it is this beam-plasma instability that leads to the generation of the crucial suprathermal electrons.
Understanding the role these instabilities play provides a first step toward still-greater control of the plasma-surface interactions, and toward further increasing the number of transistors on integrated circuits. Insights from both numerical simulations and experiments related to beam-plasma instabilities thus portend the development of new plasma sources and the increasingly advanced chips that they fabricate.
James Riordon | EurekAlert!
First results of NSTX-U research operations
26.10.2016 | DOE/Princeton Plasma Physics Laboratory
Scientists discover particles similar to Majorana fermions
25.10.2016 | Chinese Academy of Sciences Headquarters
Ultrafast lasers have introduced new possibilities in engraving ultrafine structures, and scientists are now also investigating how to use them to etch microstructures into thin glass. There are possible applications in analytics (lab on a chip) and especially in electronics and the consumer sector, where great interest has been shown.
This new method was born of a surprising phenomenon: irradiating glass in a particular way with an ultrafast laser has the effect of making the glass up to a...
Terahertz excitation of selected crystal vibrations leads to an effective magnetic field that drives coherent spin motion
Controlling functional properties by light is one of the grand goals in modern condensed matter physics and materials science. A new study now demonstrates how...
Researchers from the Institute for Quantum Computing (IQC) at the University of Waterloo led the development of a new extensible wiring technique capable of controlling superconducting quantum bits, representing a significant step towards to the realization of a scalable quantum computer.
"The quantum socket is a wiring method that uses three-dimensional wires based on spring-loaded pins to address individual qubits," said Jeremy Béjanin, a PhD...
In a paper in Scientific Reports, a research team at Worcester Polytechnic Institute describes a novel light-activated phenomenon that could become the basis for applications as diverse as microscopic robotic grippers and more efficient solar cells.
A research team at Worcester Polytechnic Institute (WPI) has developed a revolutionary, light-activated semiconductor nanocomposite material that can be used...
By forcefully embedding two silicon atoms in a diamond matrix, Sandia researchers have demonstrated for the first time on a single chip all the components needed to create a quantum bridge to link quantum computers together.
"People have already built small quantum computers," says Sandia researcher Ryan Camacho. "Maybe the first useful one won't be a single giant quantum computer...
14.10.2016 | Event News
14.10.2016 | Event News
12.10.2016 | Event News
26.10.2016 | Materials Sciences
26.10.2016 | Health and Medicine
26.10.2016 | Physics and Astronomy