Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Lighter gas reduces damage to optics in extreme ultraviolet lithography

13.09.2007
Researchers at the University of Illinois have discovered a way to generate light and reduce damage in a leading candidate for next-generation microelectronics lithography. The technique could help pack more power into smaller computer chips.

In the quest for creating computer chips with ever-smaller feature sizes, chip manufacturers are exploring extreme ultraviolet lithography as the next chip-printing technology. For a light source at the necessary wavelength, scientists have turned to a hot, ionized gas called a plasma, generated within a Z-pinch device. But, energetic ions produced in the plasma can damage the mirror responsible for collecting the light.

“By adding a lighter gas to the plasma, we can significantly reduce the damage and extend the lifetime of the collector optics,” said David Ruzic, a professor of nuclear, plasma and radiological engineering and lead author of a paper that describes the technique in the June issue of the journal IEEE Transactions on Plasma Science.

In a Z-pinch device, xenon is fed into a chamber where it collides with a stream of electrons, producing a low-temperature and low-density plasma. This plasma then flows between two cylindrical electrodes, one positioned inside the other. (The “Z” in Z-pinch refers to the direction of current flow along the cylindrical electrodes.)

Next, a large current pulse heats the plasma, while a magnetic field generated by the pulse compresses and confines the plasma. The plasma becomes hotter and denser until it “pinches,” creating the flash of light needed by the chip industry.

As the pulse passes, internal plasma pressure overcomes magnetic confinement, and the hot, dense plasma flies apart. The resulting fast and energetic ions can damage the delicate collector optics.

However, adding a small amount of a lighter gas, such as hydrogen, “significantly reduces both the number and the energy of xenon ions reaching the collector surface, thereby extending the collector’s lifetime while having a negligible effect on the extreme ultraviolet light production,” Ruzic said.

The reduction in xenon energy occurs because the hydrogen ions shield the xenon ions from the high electric field created by the plasma.

“When the plasma flies apart, the less-massive electrons move faster than the hydrogen and xenon ions,” Ruzic said. “The electric field induced by the moving electrons then pulls on the ions and accelerates them. Being much lighter than xenon ions, the hydrogen ions accelerate faster, and shield the xenon ions from some of the electric field.”

By absorbing some of the plasma’s energy, the hydrogen ions prevent the xenon ions from accelerating to the point where they damage the collector surface, thus prolonging the collector’s lifetime.

Xenon is actually the second-best radiator for light at the desired wavelength, Ruzic said. “We can get three times as much light from tin, but tin is a condensable metal and makes quite a mess on the mirrors. We are now looking at ways to clean the mirrors during chip production.”

With Ruzic, co-authors of the paper are U. of I. graduate students Keith Thompson and Josh Spencer, postdoctoral research associate Shailendra Srivastava, and former postdoctoral researcher associates Brian Jurczyk and Erik Antonsen.

James E. Kloeppel | University of Illinois
Further information:
http://www.uiuc.edu

More articles from Physics and Astronomy:

nachricht First Juno science results supported by University of Leicester's Jupiter 'forecast'
26.05.2017 | University of Leicester

nachricht Measured for the first time: Direction of light waves changed by quantum effect
24.05.2017 | Vienna University of Technology

All articles from Physics and Astronomy >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Can the immune system be boosted against Staphylococcus aureus by delivery of messenger RNA?

Staphylococcus aureus is a feared pathogen (MRSA, multi-resistant S. aureus) due to frequent resistances against many antibiotics, especially in hospital infections. Researchers at the Paul-Ehrlich-Institut have identified immunological processes that prevent a successful immune response directed against the pathogenic agent. The delivery of bacterial proteins with RNA adjuvant or messenger RNA (mRNA) into immune cells allows the re-direction of the immune response towards an active defense against S. aureus. This could be of significant importance for the development of an effective vaccine. PLOS Pathogens has published these research results online on 25 May 2017.

Staphylococcus aureus (S. aureus) is a bacterium that colonizes by far more than half of the skin and the mucosa of adults, usually without causing infections....

Im Focus: A quantum walk of photons

Physicists from the University of Würzburg are capable of generating identical looking single light particles at the push of a button. Two new studies now demonstrate the potential this method holds.

The quantum computer has fuelled the imagination of scientists for decades: It is based on fundamentally different phenomena than a conventional computer....

Im Focus: Turmoil in sluggish electrons’ existence

An international team of physicists has monitored the scattering behaviour of electrons in a non-conducting material in real-time. Their insights could be beneficial for radiotherapy.

We can refer to electrons in non-conducting materials as ‘sluggish’. Typically, they remain fixed in a location, deep inside an atomic composite. It is hence...

Im Focus: Wafer-thin Magnetic Materials Developed for Future Quantum Technologies

Two-dimensional magnetic structures are regarded as a promising material for new types of data storage, since the magnetic properties of individual molecular building blocks can be investigated and modified. For the first time, researchers have now produced a wafer-thin ferrimagnet, in which molecules with different magnetic centers arrange themselves on a gold surface to form a checkerboard pattern. Scientists at the Swiss Nanoscience Institute at the University of Basel and the Paul Scherrer Institute published their findings in the journal Nature Communications.

Ferrimagnets are composed of two centers which are magnetized at different strengths and point in opposing directions. Two-dimensional, quasi-flat ferrimagnets...

Im Focus: World's thinnest hologram paves path to new 3-D world

Nano-hologram paves way for integration of 3-D holography into everyday electronics

An Australian-Chinese research team has created the world's thinnest hologram, paving the way towards the integration of 3D holography into everyday...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Marine Conservation: IASS Contributes to UN Ocean Conference in New York on 5-9 June

24.05.2017 | Event News

AWK Aachen Machine Tool Colloquium 2017: Internet of Production for Agile Enterprises

23.05.2017 | Event News

Dortmund MST Conference presents Individualized Healthcare Solutions with micro and nanotechnology

22.05.2017 | Event News

 
Latest News

How herpesviruses win the footrace against the immune system

26.05.2017 | Life Sciences

Water forms 'spine of hydration' around DNA, group finds

26.05.2017 | Life Sciences

First Juno science results supported by University of Leicester's Jupiter 'forecast'

26.05.2017 | Physics and Astronomy

VideoLinks
B2B-VideoLinks
More VideoLinks >>>