Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

New ’liquid lens’ data for immersion lithography

21.03.2006


New data on the properties of potential "liquid lenses" compiled by the National Institute of Standards and Technology (NIST) could help the semiconductor industry continue to shrink feature sizes on computer chips.



In a paper published in the March 10, 2006 issue of Applied Optics,* NIST researchers present newly measured values for key properties of organic solvents and inorganic solutions that might be useful in immersion lithography. Little more than an idea three years ago, immersion lithography is already being commercialized, thanks in part to previously published NIST data. The technique uses liquids to sharpen the focus of patterns used in "printing" semiconductor circuits, much like the eye uses a liquid center to help form images on the retina. Prototype commercial systems use water between the last lens element and the circuit’s silicon wafer base, to focus 193-nanometer wavelengths of light down to circuit feature sizes of perhaps 45 nanometers.

The liquids used for immersion lithography must have a high refractive index--the higher the better--which affects how light bends as it crosses interfaces. NIST previously published data on the refractive index of water, which is almost 50 percent higher than that of air. "When we started this work two years ago, you couldn’t even find adequate data on water," says Simon Kaplan, lead author of the new paper.


Several companies have proposed proprietary high-index immersion liquids. The NIST work, by contrast, is a fully public report of the key optical properties of a range of fluids. The survey indicates useful trends, such as the fact that refractive index increases with molecular size, and includes data on the effect of temperature on the refractive index, which is crucial in maintaining a sharp focus during the printing process. The data may help other researchers identify useful liquids or calibrate their own measurements.

Laura Ost | EurekAlert!
Further information:
http://www.nist.gov

More articles from Physics and Astronomy:

nachricht New type of smart windows use liquid to switch from clear to reflective
14.12.2017 | The Optical Society

nachricht New ultra-thin diamond membrane is a radiobiologist's best friend
14.12.2017 | American Institute of Physics

All articles from Physics and Astronomy >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Long-lived storage of a photonic qubit for worldwide teleportation

MPQ scientists achieve long storage times for photonic quantum bits which break the lower bound for direct teleportation in a global quantum network.

Concerning the development of quantum memories for the realization of global quantum networks, scientists of the Quantum Dynamics Division led by Professor...

Im Focus: Electromagnetic water cloak eliminates drag and wake

Detailed calculations show water cloaks are feasible with today's technology

Researchers have developed a water cloaking concept based on electromagnetic forces that could eliminate an object's wake, greatly reducing its drag while...

Im Focus: Scientists channel graphene to understand filtration and ion transport into cells

Tiny pores at a cell's entryway act as miniature bouncers, letting in some electrically charged atoms--ions--but blocking others. Operating as exquisitely sensitive filters, these "ion channels" play a critical role in biological functions such as muscle contraction and the firing of brain cells.

To rapidly transport the right ions through the cell membrane, the tiny channels rely on a complex interplay between the ions and surrounding molecules,...

Im Focus: Towards data storage at the single molecule level

The miniaturization of the current technology of storage media is hindered by fundamental limits of quantum mechanics. A new approach consists in using so-called spin-crossover molecules as the smallest possible storage unit. Similar to normal hard drives, these special molecules can save information via their magnetic state. A research team from Kiel University has now managed to successfully place a new class of spin-crossover molecules onto a surface and to improve the molecule’s storage capacity. The storage density of conventional hard drives could therefore theoretically be increased by more than one hundred fold. The study has been published in the scientific journal Nano Letters.

Over the past few years, the building blocks of storage media have gotten ever smaller. But further miniaturization of the current technology is hindered by...

Im Focus: Successful Mechanical Testing of Nanowires

With innovative experiments, researchers at the Helmholtz-Zentrums Geesthacht and the Technical University Hamburg unravel why tiny metallic structures are extremely strong

Light-weight and simultaneously strong – porous metallic nanomaterials promise interesting applications as, for instance, for future aeroplanes with enhanced...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

See, understand and experience the work of the future

11.12.2017 | Event News

Innovative strategies to tackle parasitic worms

08.12.2017 | Event News

AKL’18: The opportunities and challenges of digitalization in the laser industry

07.12.2017 | Event News

 
Latest News

Plasmonic biosensors enable development of new easy-to-use health tests

14.12.2017 | Health and Medicine

New type of smart windows use liquid to switch from clear to reflective

14.12.2017 | Physics and Astronomy

BigH1 -- The key histone for male fertility

14.12.2017 | Life Sciences

VideoLinks
B2B-VideoLinks
More VideoLinks >>>