Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

New ’liquid lens’ data for immersion lithography

21.03.2006


New data on the properties of potential "liquid lenses" compiled by the National Institute of Standards and Technology (NIST) could help the semiconductor industry continue to shrink feature sizes on computer chips.



In a paper published in the March 10, 2006 issue of Applied Optics,* NIST researchers present newly measured values for key properties of organic solvents and inorganic solutions that might be useful in immersion lithography. Little more than an idea three years ago, immersion lithography is already being commercialized, thanks in part to previously published NIST data. The technique uses liquids to sharpen the focus of patterns used in "printing" semiconductor circuits, much like the eye uses a liquid center to help form images on the retina. Prototype commercial systems use water between the last lens element and the circuit’s silicon wafer base, to focus 193-nanometer wavelengths of light down to circuit feature sizes of perhaps 45 nanometers.

The liquids used for immersion lithography must have a high refractive index--the higher the better--which affects how light bends as it crosses interfaces. NIST previously published data on the refractive index of water, which is almost 50 percent higher than that of air. "When we started this work two years ago, you couldn’t even find adequate data on water," says Simon Kaplan, lead author of the new paper.


Several companies have proposed proprietary high-index immersion liquids. The NIST work, by contrast, is a fully public report of the key optical properties of a range of fluids. The survey indicates useful trends, such as the fact that refractive index increases with molecular size, and includes data on the effect of temperature on the refractive index, which is crucial in maintaining a sharp focus during the printing process. The data may help other researchers identify useful liquids or calibrate their own measurements.

Laura Ost | EurekAlert!
Further information:
http://www.nist.gov

More articles from Physics and Astronomy:

nachricht When helium behaves like a black hole
22.03.2017 | University of Vermont

nachricht Astronomers hazard a ride in a 'drifting carousel' to understand pulsating stars
22.03.2017 | International Centre for Radio Astronomy Research

All articles from Physics and Astronomy >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Giant Magnetic Fields in the Universe

Astronomers from Bonn and Tautenburg in Thuringia (Germany) used the 100-m radio telescope at Effelsberg to observe several galaxy clusters. At the edges of these large accumulations of dark matter, stellar systems (galaxies), hot gas, and charged particles, they found magnetic fields that are exceptionally ordered over distances of many million light years. This makes them the most extended magnetic fields in the universe known so far.

The results will be published on March 22 in the journal „Astronomy & Astrophysics“.

Galaxy clusters are the largest gravitationally bound structures in the universe. With a typical extent of about 10 million light years, i.e. 100 times the...

Im Focus: Tracing down linear ubiquitination

Researchers at the Goethe University Frankfurt, together with partners from the University of Tübingen in Germany and Queen Mary University as well as Francis Crick Institute from London (UK) have developed a novel technology to decipher the secret ubiquitin code.

Ubiquitin is a small protein that can be linked to other cellular proteins, thereby controlling and modulating their functions. The attachment occurs in many...

Im Focus: Perovskite edges can be tuned for optoelectronic performance

Layered 2D material improves efficiency for solar cells and LEDs

In the eternal search for next generation high-efficiency solar cells and LEDs, scientists at Los Alamos National Laboratory and their partners are creating...

Im Focus: Polymer-coated silicon nanosheets as alternative to graphene: A perfect team for nanoelectronics

Silicon nanosheets are thin, two-dimensional layers with exceptional optoelectronic properties very similar to those of graphene. Albeit, the nanosheets are less stable. Now researchers at the Technical University of Munich (TUM) have, for the first time ever, produced a composite material combining silicon nanosheets and a polymer that is both UV-resistant and easy to process. This brings the scientists a significant step closer to industrial applications like flexible displays and photosensors.

Silicon nanosheets are thin, two-dimensional layers with exceptional optoelectronic properties very similar to those of graphene. Albeit, the nanosheets are...

Im Focus: Researchers Imitate Molecular Crowding in Cells

Enzymes behave differently in a test tube compared with the molecular scrum of a living cell. Chemists from the University of Basel have now been able to simulate these confined natural conditions in artificial vesicles for the first time. As reported in the academic journal Small, the results are offering better insight into the development of nanoreactors and artificial organelles.

Enzymes behave differently in a test tube compared with the molecular scrum of a living cell. Chemists from the University of Basel have now been able to...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

International Land Use Symposium ILUS 2017: Call for Abstracts and Registration open

20.03.2017 | Event News

CONNECT 2017: International congress on connective tissue

14.03.2017 | Event News

ICTM Conference: Turbine Construction between Big Data and Additive Manufacturing

07.03.2017 | Event News

 
Latest News

Pulverizing electronic waste is green, clean -- and cold

22.03.2017 | Materials Sciences

Astronomers hazard a ride in a 'drifting carousel' to understand pulsating stars

22.03.2017 | Physics and Astronomy

New gel-like coating beefs up the performance of lithium-sulfur batteries

22.03.2017 | Materials Sciences

VideoLinks
B2B-VideoLinks
More VideoLinks >>>