Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:


Finding the true measure of nanoscale ’roughness’


Straight edges, good. Wavy edges, bad. This simple description holds true whether you are painting the living room or manufacturing nanoscale circuit features.

A colorized scanning electron microscope image shows the "waviness" or roughness of edges on reference lines made of silicon that are about 100 nanometers wide. Credit: B. Bunday, SEMATECH/K. Talbott, NIST

A new NIST/SEMATECH technique should help semiconductor facilities improve measurement of the "linewidth roughness." Courtesy HDR Architecture, Inc./Steve Hall© Hedrich Blessing

In a technical paper* published in June, researchers at the National Institute of Standards and Technology (NIST) and SEMATECH describe an improved method for determining nanoscale "linewidth roughness," an important quality control factor in semiconductor fabrication. Their research shows that current industry measurement methods may be exaggerating roughness of the smoothest circuit features by 40 percent or more above true values.

As circuit features shrink in size to below 50 nanometers, wavy or rough edges within semiconductor transistors may cause circuit current losses or may prevent the devices from reliably turning on and off with the same amount of voltage.

"With this type of measurement," says NIST’s John Villarrubia, "besides the real roughness there is also a false roughness caused by measurement noise. Our method includes a correction to remove bias or systematic error from the measurement."

Random noise, by definition, causes the measured value to be sometimes higher, sometimes lower than the true value, and can be minimized by simply averaging an adequate number of measurements. Systematic error, however, is consistently above or consistently below the true value due to some quirk of the measurement method.

The noise in nanoscale scanning electron microscope (SEM) images consistently adds extra roughness, says Villarrubia. The NIST/SEMATECH method involves taking two or more images at exactly the same location on a circuit feature, comparing the values, and subtracting the false roughness caused by measurement noise. SEM manufacturers should be able to incorporate the new method into their proprietary software for automated linewidth roughness measurements.

* J.S. Villarrubia and B.D. Bunday, Unbiased Estimation of Linewidth Roughness, Proceedings of SPIE 5752 (2005) pp. 480-488.

Gail Porter | EurekAlert!
Further information:

More articles from Physics and Astronomy:

nachricht Move over, lasers: Scientists can now create holograms from neutrons, too
21.10.2016 | National Institute of Standards and Technology (NIST)

nachricht Finding the lightest superdeformed triaxial atomic nucleus
20.10.2016 | The Henryk Niewodniczanski Institute of Nuclear Physics Polish Academy of Sciences

All articles from Physics and Astronomy >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: New 3-D wiring technique brings scalable quantum computers closer to reality

Researchers from the Institute for Quantum Computing (IQC) at the University of Waterloo led the development of a new extensible wiring technique capable of controlling superconducting quantum bits, representing a significant step towards to the realization of a scalable quantum computer.

"The quantum socket is a wiring method that uses three-dimensional wires based on spring-loaded pins to address individual qubits," said Jeremy Béjanin, a PhD...

Im Focus: Scientists develop a semiconductor nanocomposite material that moves in response to light

In a paper in Scientific Reports, a research team at Worcester Polytechnic Institute describes a novel light-activated phenomenon that could become the basis for applications as diverse as microscopic robotic grippers and more efficient solar cells.

A research team at Worcester Polytechnic Institute (WPI) has developed a revolutionary, light-activated semiconductor nanocomposite material that can be used...

Im Focus: Diamonds aren't forever: Sandia, Harvard team create first quantum computer bridge

By forcefully embedding two silicon atoms in a diamond matrix, Sandia researchers have demonstrated for the first time on a single chip all the components needed to create a quantum bridge to link quantum computers together.

"People have already built small quantum computers," says Sandia researcher Ryan Camacho. "Maybe the first useful one won't be a single giant quantum computer...

Im Focus: New Products - Highlights of COMPAMED 2016

COMPAMED has become the leading international marketplace for suppliers of medical manufacturing. The trade fair, which takes place every November and is co-located to MEDICA in Dusseldorf, has been steadily growing over the past years and shows that medical technology remains a rapidly growing market.

In 2016, the joint pavilion by the IVAM Microtechnology Network, the Product Market “High-tech for Medical Devices”, will be located in Hall 8a again and will...

Im Focus: Ultra-thin ferroelectric material for next-generation electronics

'Ferroelectric' materials can switch between different states of electrical polarization in response to an external electric field. This flexibility means they show promise for many applications, for example in electronic devices and computer memory. Current ferroelectric materials are highly valued for their thermal and chemical stability and rapid electro-mechanical responses, but creating a material that is scalable down to the tiny sizes needed for technologies like silicon-based semiconductors (Si-based CMOS) has proven challenging.

Now, Hiroshi Funakubo and co-workers at the Tokyo Institute of Technology, in collaboration with researchers across Japan, have conducted experiments to...

All Focus news of the innovation-report >>>



Event News

#IC2S2: When Social Science meets Computer Science - GESIS will host the IC2S2 conference 2017

14.10.2016 | Event News

Agricultural Trade Developments and Potentials in Central Asia and the South Caucasus

14.10.2016 | Event News

World Health Summit – Day Three: A Call to Action

12.10.2016 | Event News

Latest News

Resolving the mystery of preeclampsia

21.10.2016 | Health and Medicine

Stanford researchers create new special-purpose computer that may someday save us billions

21.10.2016 | Information Technology

From ancient fossils to future cars

21.10.2016 | Materials Sciences

More VideoLinks >>>