Because of the versatility of their approach—it can be used with a wide range of ions tailored to the task at hand—it is expected to have broad application in nanotechnology both for carving smaller features on semiconductors than now are possible and for nondestructive imaging of nanoscale structures with finer resolution than currently possible with electron microscopes.
Researchers and manufacturers routinely use intense, focused beams of ions to carve nanometer-sized features into a wide variety of targets. In principle, ion beams also could produce better images of nanoscale surface features than conventional electron microscopy. But the current technology for both applications is problematic. In the most widely used method, a metal-coated needle generates a narrowly focused beam of gallium ions. The high energies needed to focus gallium for milling tasks end up burying small amounts in the sample, contaminating the material. And because gallium ions are so heavy (comparatively speaking), if used to collect images they inadvertently damage the sample, blasting away some of its surface while it is being observed. Researchers have tried using other types of ions but were unable to produce the brightness or intensity necessary for the ion beam to cut into most materials.
The NIST team took a completely different approach to generating a focused ion beam that opens up the possibility for use of non-contaminating elements. Instead of starting with a sharp metal point, they generate a small "cloud" of atoms and then combine magnetic fields with laser light to trap and cool these atoms to extremely low temperatures. Another laser is used to ionize the atoms, and the charged particles are accelerated through a small hole to create a small but energetic beam of ions. Researchers have named the groundbreaking device "MOTIS," for "Magneto-Optical Trap Ion Source." (For more on MOTs, see "Bon MOT: Innovative Atom Trap Catches Highly Magnetic Atoms," NIST Tech Beat Apr. 1, 2008.)
"Because the lasers cool the atoms to a very low temperature, they're not moving around in random directions very much. As a result, when we accelerate them the ions travel in a highly parallel beam, which is necessary for focusing them down to a very small spot," explains Jabez McClelland of the NIST Center for Nanoscale Science and Technology. The team was able to measure the tiny spread of the beam and show that it was indeed small enough to allow the beam to be focused to a spot size less than 1 nanometer. The initial demonstration used chromium atoms, establishing that other elements besides gallium can achieve the brightness and intensity to work as a focused ion beam "nano-scalpel." The same technique, says McClelland, can be used with a wide variety of other atoms, which could be selected for special tasks such as milling nanoscale features without introducing contaminants, or to enhance contrast for ion beam microscopy.
* J. L. Hanssen, S. B. Hill, J. Orloff and J. J. McClelland. Magneto-optical trap-based, high brightness ion source for use as a nanoscale probe. Nano Letters 8, 2844 (2008).
Mark Bello | EurekAlert!
Significantly more productivity in USP lasers
06.12.2016 | Fraunhofer-Institut für Lasertechnik ILT
Shape matters when light meets atom
05.12.2016 | Centre for Quantum Technologies at the National University of Singapore
In recent years, lasers with ultrashort pulses (USP) down to the femtosecond range have become established on an industrial scale. They could advance some applications with the much-lauded “cold ablation” – if that meant they would then achieve more throughput. A new generation of process engineering that will address this issue in particular will be discussed at the “4th UKP Workshop – Ultrafast Laser Technology” in April 2017.
Even back in the 1990s, scientists were comparing materials processing with nanosecond, picosecond and femtosesecond pulses. The result was surprising:...
Have you ever wondered how you see the world? Vision is about photons of light, which are packets of energy, interacting with the atoms or molecules in what...
A multi-institutional research collaboration has created a novel approach for fabricating three-dimensional micro-optics through the shape-defined formation of porous silicon (PSi), with broad impacts in integrated optoelectronics, imaging, and photovoltaics.
Working with colleagues at Stanford and The Dow Chemical Company, researchers at the University of Illinois at Urbana-Champaign fabricated 3-D birefringent...
In experiments with magnetic atoms conducted at extremely low temperatures, scientists have demonstrated a unique phase of matter: The atoms form a new type of quantum liquid or quantum droplet state. These so called quantum droplets may preserve their form in absence of external confinement because of quantum effects. The joint team of experimental physicists from Innsbruck and theoretical physicists from Hannover report on their findings in the journal Physical Review X.
“Our Quantum droplets are in the gas phase but they still drop like a rock,” explains experimental physicist Francesca Ferlaino when talking about the...
The Max Planck Institute for Physics (MPP) is opening up a new research field. A workshop from November 21 - 22, 2016 will mark the start of activities for an innovative axion experiment. Axions are still only purely hypothetical particles. Their detection could solve two fundamental problems in particle physics: What dark matter consists of and why it has not yet been possible to directly observe a CP violation for the strong interaction.
The “MADMAX” project is the MPP’s commitment to axion research. Axions are so far only a theoretical prediction and are difficult to detect: on the one hand,...
16.11.2016 | Event News
01.11.2016 | Event News
14.10.2016 | Event News
06.12.2016 | Power and Electrical Engineering
06.12.2016 | Earth Sciences
06.12.2016 | Physics and Astronomy