Because of the versatility of their approach—it can be used with a wide range of ions tailored to the task at hand—it is expected to have broad application in nanotechnology both for carving smaller features on semiconductors than now are possible and for nondestructive imaging of nanoscale structures with finer resolution than currently possible with electron microscopes.
Researchers and manufacturers routinely use intense, focused beams of ions to carve nanometer-sized features into a wide variety of targets. In principle, ion beams also could produce better images of nanoscale surface features than conventional electron microscopy. But the current technology for both applications is problematic. In the most widely used method, a metal-coated needle generates a narrowly focused beam of gallium ions. The high energies needed to focus gallium for milling tasks end up burying small amounts in the sample, contaminating the material. And because gallium ions are so heavy (comparatively speaking), if used to collect images they inadvertently damage the sample, blasting away some of its surface while it is being observed. Researchers have tried using other types of ions but were unable to produce the brightness or intensity necessary for the ion beam to cut into most materials.
The NIST team took a completely different approach to generating a focused ion beam that opens up the possibility for use of non-contaminating elements. Instead of starting with a sharp metal point, they generate a small "cloud" of atoms and then combine magnetic fields with laser light to trap and cool these atoms to extremely low temperatures. Another laser is used to ionize the atoms, and the charged particles are accelerated through a small hole to create a small but energetic beam of ions. Researchers have named the groundbreaking device "MOTIS," for "Magneto-Optical Trap Ion Source." (For more on MOTs, see "Bon MOT: Innovative Atom Trap Catches Highly Magnetic Atoms," NIST Tech Beat Apr. 1, 2008.)
"Because the lasers cool the atoms to a very low temperature, they're not moving around in random directions very much. As a result, when we accelerate them the ions travel in a highly parallel beam, which is necessary for focusing them down to a very small spot," explains Jabez McClelland of the NIST Center for Nanoscale Science and Technology. The team was able to measure the tiny spread of the beam and show that it was indeed small enough to allow the beam to be focused to a spot size less than 1 nanometer. The initial demonstration used chromium atoms, establishing that other elements besides gallium can achieve the brightness and intensity to work as a focused ion beam "nano-scalpel." The same technique, says McClelland, can be used with a wide variety of other atoms, which could be selected for special tasks such as milling nanoscale features without introducing contaminants, or to enhance contrast for ion beam microscopy.
* J. L. Hanssen, S. B. Hill, J. Orloff and J. J. McClelland. Magneto-optical trap-based, high brightness ion source for use as a nanoscale probe. Nano Letters 8, 2844 (2008).
Mark Bello | EurekAlert!
OU-led team discovers rare, newborn tri-star system using ALMA
27.10.2016 | University of Oklahoma
First results of NSTX-U research operations
26.10.2016 | DOE/Princeton Plasma Physics Laboratory
Ultrafast lasers have introduced new possibilities in engraving ultrafine structures, and scientists are now also investigating how to use them to etch microstructures into thin glass. There are possible applications in analytics (lab on a chip) and especially in electronics and the consumer sector, where great interest has been shown.
This new method was born of a surprising phenomenon: irradiating glass in a particular way with an ultrafast laser has the effect of making the glass up to a...
Terahertz excitation of selected crystal vibrations leads to an effective magnetic field that drives coherent spin motion
Controlling functional properties by light is one of the grand goals in modern condensed matter physics and materials science. A new study now demonstrates how...
Researchers from the Institute for Quantum Computing (IQC) at the University of Waterloo led the development of a new extensible wiring technique capable of controlling superconducting quantum bits, representing a significant step towards to the realization of a scalable quantum computer.
"The quantum socket is a wiring method that uses three-dimensional wires based on spring-loaded pins to address individual qubits," said Jeremy Béjanin, a PhD...
In a paper in Scientific Reports, a research team at Worcester Polytechnic Institute describes a novel light-activated phenomenon that could become the basis for applications as diverse as microscopic robotic grippers and more efficient solar cells.
A research team at Worcester Polytechnic Institute (WPI) has developed a revolutionary, light-activated semiconductor nanocomposite material that can be used...
By forcefully embedding two silicon atoms in a diamond matrix, Sandia researchers have demonstrated for the first time on a single chip all the components needed to create a quantum bridge to link quantum computers together.
"People have already built small quantum computers," says Sandia researcher Ryan Camacho. "Maybe the first useful one won't be a single giant quantum computer...
14.10.2016 | Event News
14.10.2016 | Event News
12.10.2016 | Event News
27.10.2016 | Materials Sciences
27.10.2016 | Physics and Astronomy
27.10.2016 | Life Sciences