The Fraunhofer IISB lithography simulation software will be distributed as the Dr.LiTHO [1, 2] software package. Dr.LiTHO was formerly used as the internal development and research lithography simulator of Fraunhofer IISB and can now be purchased from this institute. This direct approach to market replaces the collaboration with SIGMA-C. Following the acquisition of SIGMA-C by Synopsys, Synopsys and Fraunhofer IISB could not reach a new agreement on the terms for continuing the cooperation.
The Munich-based software house SIGMA-C has been the sales partner for the simulation algorithms developed by Fraunhofer. As frequently published during this long-lasting cooperation between Fraunhofer IISB and SIGMA-C, important kernel algorithms of the established lithography simulators SOLID-C, SOLID-EUV, and SOLID-E were developed at Fraunhofer IISB. This, among others, includes FDTD  and the Waveguide Method  for the rigorous simulation of light diffraction from optical masks and extensions thereof for the modeling of EUV masks , for lithographic exposures over topography , and decomposition techniques for the fast rigorous simulation of larger mask areas .
The Fraunhofer software Dr.LiTHO includes revised and optimized versions of the Waveguide Method for the rigorous simulation of mask diffraction effects, mesoscopic models for the description of line edge roughness (LER), and several interfaces for the coupling of lithography simulation flows with external academic or commercial simulators, in addition to standard simulation models which were also included in SOLID-E.
Dr.LiTHO employs a user concept based on the modern programming language Python. This approach offers wide portability, various methods for parallelization, easy-to-use visualization components, and much more [1, 2]. Dr.LiTHO can be easily adapted to the modeling of alternative lithography techniques such as interference exposures, near field lithography, and/or contact and proximity printing. Optionally, Dr.LiTHO can be combined with the advanced optimization tools of Fraunhofer IISB . Additional capabilities and interfaces will be added to Dr.LiTHO through future research and development.In the future, the advanced lithography simulation algorithms of Fraunhofer IISB will also be combined and commercialized in combination with various simulation and metrology tools of academic research groups and commercial suppliers. New developments in the distribution of the IISB simulation software, including strategic alliances, will be published on our web site 
and on appropriate occasions elsewhere.
A user group will be established to support the industrial application and further development of Dr.LiTHO. Fraunhofer IISB will support members of this user group to adapt the simulation algorithms of Dr.LiTHO to their specific purpose. The requirements as defined by the user group will have a strong impact on the further development of Dr.LiTHO, both for "traditional applications" of lithography simulation in projection printing for semiconductor fabrication and for alternative lithographic technologies and areas of application.
The Fraunhofer IISB lithography simulation group has a long-standing history in lithography simulation. Almost 20 years ago Wolfgang Henke, at that time at Fraunhofer IMT, started to develop algorithms for the simulation of lithographic projection printing processes . Today, the lithography simulation group of Fraunhofer IISB led by Andreas Erdmann employs 8 scientists and PhD students with various backgrounds in physics/optics, electrical engineering, and computer science. www.drlitho.com.
 W. Henke, R. Schwalm, M. Weiss, and J. Pelka: "Diffraction effects in submicron contact/proximity printing", Microelectronic Engineering 10 (1989)Fraunhofer Institute of
Construction of practical quantum computers radically simplified
05.12.2016 | University of Sussex
UT professor develops algorithm to improve online mapping of disaster areas
29.11.2016 | University of Tennessee at Knoxville
In recent years, lasers with ultrashort pulses (USP) down to the femtosecond range have become established on an industrial scale. They could advance some applications with the much-lauded “cold ablation” – if that meant they would then achieve more throughput. A new generation of process engineering that will address this issue in particular will be discussed at the “4th UKP Workshop – Ultrafast Laser Technology” in April 2017.
Even back in the 1990s, scientists were comparing materials processing with nanosecond, picosecond and femtosesecond pulses. The result was surprising:...
Have you ever wondered how you see the world? Vision is about photons of light, which are packets of energy, interacting with the atoms or molecules in what...
A multi-institutional research collaboration has created a novel approach for fabricating three-dimensional micro-optics through the shape-defined formation of porous silicon (PSi), with broad impacts in integrated optoelectronics, imaging, and photovoltaics.
Working with colleagues at Stanford and The Dow Chemical Company, researchers at the University of Illinois at Urbana-Champaign fabricated 3-D birefringent...
In experiments with magnetic atoms conducted at extremely low temperatures, scientists have demonstrated a unique phase of matter: The atoms form a new type of quantum liquid or quantum droplet state. These so called quantum droplets may preserve their form in absence of external confinement because of quantum effects. The joint team of experimental physicists from Innsbruck and theoretical physicists from Hannover report on their findings in the journal Physical Review X.
“Our Quantum droplets are in the gas phase but they still drop like a rock,” explains experimental physicist Francesca Ferlaino when talking about the...
The Max Planck Institute for Physics (MPP) is opening up a new research field. A workshop from November 21 - 22, 2016 will mark the start of activities for an innovative axion experiment. Axions are still only purely hypothetical particles. Their detection could solve two fundamental problems in particle physics: What dark matter consists of and why it has not yet been possible to directly observe a CP violation for the strong interaction.
The “MADMAX” project is the MPP’s commitment to axion research. Axions are so far only a theoretical prediction and are difficult to detect: on the one hand,...
16.11.2016 | Event News
01.11.2016 | Event News
14.10.2016 | Event News
06.12.2016 | Materials Sciences
06.12.2016 | Medical Engineering
06.12.2016 | Power and Electrical Engineering