Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Performance boost for microchips

08.05.2012
German scientists of the Fraunhofer Institutes for Laser Technology ILT Aachen, for Material and Beam Technology IWS Dresden and for Applied Optics and Precision Engineering IOF Jena obtained the Joseph-von- Fraunhofer prize on May 8, 2012. They were honoured together with their teams in the scope of the annual meeting of the Fraunhofer Society in Stuttgart, Germany, for their joint development of key components for EUV lithography.

Flat computers, powerful cell phones and tablets – the integrated circuits, our computers‘ power centers, are becoming increasingly smaller and more complex.


EUV Technology for the production of the next chip generation. Picture source: Fraunhofer-Institute for Laser Technology ILT, Aachen, Germany.


Jointly developed key components for EUV lithography: Dr. Tosten Feigl, Dr. Stefan Braun and Dr. Klaus Bergmann (from left to right) with a collector mirror. Picture source: Dirk Mahler/Fraunhofer

The microchips in today‘s computers already contain some two billion transistors. To get the chip density right, the structures are exposed onto the chips by means of lithography. To be able to meet future requirements, the semi-conductor industry is planning to convert the exposure using a wavelength of 193 nm to a wavelength of just 13.5 nm. This can be achieved only with completely new radiation sources.

The favorite of the Next-Generation lithography is EUV – light with wavelengths in the extreme ultraviolet range. Dr. Klaus Bergmann, Dr. Stefan Braun and Dr. Torsten Feigl from the Fraunhofer Institutes for Laser Technology ILT Aachen, for Material and Beam Technology IWS Dresden and for Applied Optics and Precision Engineering IOF Jena, have developed, with their teams, key elements for EUV lithography: light sources (ILT), collector optics (IOF) and illumination and projection optics (IWS). They will receive a 2012 Joseph-von- Fraunhofer prize for their achievements in this strategic partnership.

Generating EUV radiation

The efficiency of the light source is key to the industrial use of EUV. The team around Klaus Bergmann at ILT developed the first prototypes of the EUV source as early as 2006. There is now a beta version that is already being used to expose chips in industrial applications. “The concept is based on the rapid, pulsed discharge of electrically stored energy. In the process, a small amount of tin is vaporized using a laser and excited with a high current to an emission at 13.5 nm – many thousands of times per second”, explains Bergmann.

World‘s largest collector mirror for EUV lithography

The quality of the collector mirror is crucial to the radiation hitting the exposure mask in exactly the right place. The coating guarantees that the losses remain low and that the quality of the focused EUV radiation is high. “The challenge we faced was to develop and apply a multilayer coating system that combined high EUV reflectance with high thermal and radiation stability onto the strongly curved collector surface”, said Torsten Feigl from IOF. The result is the world‘s largest multi-layer coated EUV mirror with a diameter of more than 660 millimeters.

Coating for optimized reflection on mirrors and lenses

Once the radiation passed the mask, it is exposed onto the chips via further projection mirrors. Stefan Braun and his team at IWS have devised the optimum reflection layer for these components. Magnetron sputtering ensures maximum layer accuracy, without additional polishing processes or in-situ thickness control being required. One machine type for large area precision coating is already in industrial use. Germany is the pioneer of EUV technology. Three institutes have established themselves with their research work as key partners for the supplier industry both in and outside Europe. The new lithography technology is expected to start industrial production in 2015.

Joseph-von-Fraunhofer prize – research for practical applications

Since 1978, Fraunhofer-Gesellschaft has awarded the annual prizes for outstanding scientific achievements of its employees that resolve application-related problems. To date, more than 200 researchers have won this prize. This year, four prizes worth 20,000 euro each will be awarded. The prize winners will also receive a silver pin with the facial profile of the patron saint as it appears in the logo of articles 2 to 5.

Contacts at the Fraunhofer ILT
If you have any questions regarding this topic, please feel free to contact our experts:
Dr. Klaus Bergmann
Group Manager EUV Technology
Phone +49 241 8906-302
klaus.bergmann@ilt.fraunhofer.de
Fraunhofer Institute for Laser Technology ILT
Steinbachstraße 15
52074 Aachen
Phone +49 241 8906-0
Fax +49 241 8906-121

Axel Bauer | Fraunhofer Forschung Kompakt
Further information:
http://www.ilt.fraunhofer.de

More articles from Power and Electrical Engineering:

nachricht Stanford researchers develop a new type of soft, growing robot
21.07.2017 | Stanford University

nachricht Team develops fast, cheap method to make supercapacitor electrodes
18.07.2017 | University of Washington

All articles from Power and Electrical Engineering >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Manipulating Electron Spins Without Loss of Information

Physicists have developed a new technique that uses electrical voltages to control the electron spin on a chip. The newly-developed method provides protection from spin decay, meaning that the contained information can be maintained and transmitted over comparatively large distances, as has been demonstrated by a team from the University of Basel’s Department of Physics and the Swiss Nanoscience Institute. The results have been published in Physical Review X.

For several years, researchers have been trying to use the spin of an electron to store and transmit information. The spin of each electron is always coupled...

Im Focus: The proton precisely weighted

What is the mass of a proton? Scientists from Germany and Japan successfully did an important step towards the most exact knowledge of this fundamental constant. By means of precision measurements on a single proton, they could improve the precision by a factor of three and also correct the existing value.

To determine the mass of a single proton still more accurate – a group of physicists led by Klaus Blaum and Sven Sturm of the Max Planck Institute for Nuclear...

Im Focus: On the way to a biological alternative

A bacterial enzyme enables reactions that open up alternatives to key industrial chemical processes

The research team of Prof. Dr. Oliver Einsle at the University of Freiburg's Institute of Biochemistry has long been exploring the functioning of nitrogenase....

Im Focus: The 1 trillion tonne iceberg

Larsen C Ice Shelf rift finally breaks through

A one trillion tonne iceberg - one of the biggest ever recorded -- has calved away from the Larsen C Ice Shelf in Antarctica, after a rift in the ice,...

Im Focus: Laser-cooled ions contribute to better understanding of friction

Physics supports biology: Researchers from PTB have developed a model system to investigate friction phenomena with atomic precision

Friction: what you want from car brakes, otherwise rather a nuisance. In any case, it is useful to know as precisely as possible how friction phenomena arise –...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Closing the Sustainability Circle: Protection of Food with Biobased Materials

21.07.2017 | Event News

»We are bringing Additive Manufacturing to SMEs«

19.07.2017 | Event News

The technology with a feel for feelings

12.07.2017 | Event News

 
Latest News

NASA looks to solar eclipse to help understand Earth's energy system

21.07.2017 | Earth Sciences

Stanford researchers develop a new type of soft, growing robot

21.07.2017 | Power and Electrical Engineering

Vortex photons from electrons in circular motion

21.07.2017 | Physics and Astronomy

VideoLinks
B2B-VideoLinks
More VideoLinks >>>