Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

World's First Diamond Nanoelectromechanical Switch Toward New Functionality of Diamonds and ...

27.12.2010
... Nano/Microelectromechanical Systems

Researchers at NIMS have succeeded in the batch fabrication of suspended structures (cantilevers and bridges) of single crystal diamond for nano/micro electromechanical systems.

Dr. Meiyong Liao, a Senior Researcher of Sensor Materials Center (Managing Director: Hajime Haneda), National Institute for Materials Science (President: Sukekatsu Ushioda), cooperated with his colleagues, succeeded in the batch fabrication of suspended structures (cantilevers and bridges) of single crystal diamond for nano/micro electromechanical systems (NEMS/MEMS). Based on this process, they achieved in the world the first single crystal diamond NEMS switch.

The NEMS switch has the advantages of low-leakage current, low-power consumption and sharp on/off ratio in comparison with the conventional semiconductor devices. Most of the existing NEMS/MEMS switches are based on silicon or metal materials, which have the drawbacks of poor mechanical, chemical, and thermal stability, poor reliability and durability. Diamond is the ideal material for NEMS/MEMS due to the highest elastic modulus, mechanical hardness, thermal conductivity, and variable electrical conductivity from insulator to conductor. However, due to the difficultly in fabricating suspended structures of single crystal diamond, the development of single crystal diamond NEMS/MEMS devices has been a challenge.

The NIMS research team developed a process for fabricating suspended single crystal diamond structures by locally forming a graphite sacrificial layer in a single crystal diamond substrate by high energy ion implantation, followed by the growth of a diamond epilayer with electrical conductivity by microwave plasma chemical vapor deposition method (MPCVD) and the removal of the graphite sacrificial layer. As a further development of this technique, the group also succeeded for the first time in fabricating NEMS switching devices with a transistor-like structure comprising 3 electrodes.

The leakage current of the developed diamond NEMS switch is very low, and the power consumption is less than 10pW (picowatt). The devices exhibit high reproducibility, high reliability and no surface stiction. Stable operation of the diamond NEMS switch in a high temperature environment (250‹C) was also confirmed. The Youngfs modulus of the moveable cantilever structure was measured to be 1100GPa, which is close to the value of bulk diamond single crystals. Thus, high-speed (gigahertz) switching operation can be expected.

In comparison with the existing MEMS switches, the diamond NEMS switches are expected to show greatly improved functions, including reliability, lifetime, speed, and electrical handling capacity, etc. The developed devices can be applied as microwave switch for next-generation wireless communications and logic circuit under harsh environments. These research results also establish the infrastructure for diamond NEMS/MEMS with novel functions, opening the way for the development of various chemical, physical, and mechanical sensors.

For more detail contact:

Meiyong Liao (English inquiry)
Optical Sensor Group, Sensor Materials Center
National Institute for Materials Science
TEL: +81-29-860-4311
FAX: +91-29-851-4005
E-Mail: meiyong.liao@nims.go.jp
Yasuo Koide (Japanese inquiry)
E-Mail: koide.yasuo@nims.go.jp

Mikiko Tanifuji | EurekAlert!
Further information:
http://www.nims.go.jp
http://www.researchsea.com

More articles from Materials Sciences:

nachricht Strange but true: Turning a material upside down can sometimes make it softer
20.10.2017 | Universitat Autonoma de Barcelona

nachricht Metallic nanoparticles will help to determine the percentage of volatile compounds
20.10.2017 | Lomonosov Moscow State University

All articles from Materials Sciences >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: Neutron star merger directly observed for the first time

University of Maryland researchers contribute to historic detection of gravitational waves and light created by event

On August 17, 2017, at 12:41:04 UTC, scientists made the first direct observation of a merger between two neutron stars--the dense, collapsed cores that remain...

Im Focus: Breaking: the first light from two neutron stars merging

Seven new papers describe the first-ever detection of light from a gravitational wave source. The event, caused by two neutron stars colliding and merging together, was dubbed GW170817 because it sent ripples through space-time that reached Earth on 2017 August 17. Around the world, hundreds of excited astronomers mobilized quickly and were able to observe the event using numerous telescopes, providing a wealth of new data.

Previous detections of gravitational waves have all involved the merger of two black holes, a feat that won the 2017 Nobel Prize in Physics earlier this month....

Im Focus: Smart sensors for efficient processes

Material defects in end products can quickly result in failures in many areas of industry, and have a massive impact on the safe use of their products. This is why, in the field of quality assurance, intelligent, nondestructive sensor systems play a key role. They allow testing components and parts in a rapid and cost-efficient manner without destroying the actual product or changing its surface. Experts from the Fraunhofer IZFP in Saarbrücken will be presenting two exhibits at the Blechexpo in Stuttgart from 7–10 November 2017 that allow fast, reliable, and automated characterization of materials and detection of defects (Hall 5, Booth 5306).

When quality testing uses time-consuming destructive test methods, it can result in enormous costs due to damaging or destroying the products. And given that...

Im Focus: Cold molecules on collision course

Using a new cooling technique MPQ scientists succeed at observing collisions in a dense beam of cold and slow dipolar molecules.

How do chemical reactions proceed at extremely low temperatures? The answer requires the investigation of molecular samples that are cold, dense, and slow at...

Im Focus: Shrinking the proton again!

Scientists from the Max Planck Institute of Quantum Optics, using high precision laser spectroscopy of atomic hydrogen, confirm the surprisingly small value of the proton radius determined from muonic hydrogen.

It was one of the breakthroughs of the year 2010: Laser spectroscopy of muonic hydrogen resulted in a value for the proton charge radius that was significantly...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

ASEAN Member States discuss the future role of renewable energy

17.10.2017 | Event News

World Health Summit 2017: International experts set the course for the future of Global Health

10.10.2017 | Event News

Climate Engineering Conference 2017 Opens in Berlin

10.10.2017 | Event News

 
Latest News

Terahertz spectroscopy goes nano

20.10.2017 | Information Technology

Strange but true: Turning a material upside down can sometimes make it softer

20.10.2017 | Materials Sciences

NRL clarifies valley polarization for electronic and optoelectronic technologies

20.10.2017 | Interdisciplinary Research

VideoLinks
B2B-VideoLinks
More VideoLinks >>>