Forum for Science, Industry and Business

Sponsored by:     3M 
Search our Site:

 

Precision bonding makes tiny high performance actuators possible

04.10.2005


Using a new precision bonding process they developed, Penn State researchers have designed and fabricated tiny new piezoelectric microactuators -- the largest only a hair’s breadth wide -- based on coupling commercially available materials with existing micromachining technology.


Some possible applications of the new Penn State piezoelectric microactuator



The new actuators promise to be low cost, and capable of providing controlled force, high resolution and large displacements appropriate for applications in RF switches for cell phones, for example, or optical switches for wide screen TVs. Other potential applications include microfluidic pumps and valves, micromanipulators for nanoscale handling and atomic force microscope drives.

Dr. Srinivas A. Tadigadapa, associate professor of electrical engineering and a developer of the bonding process and microactuator, says, "These new piezoelectric microactuators are the first realized using microfabrication methods, a mature technology used to make computer chips and micromachines from silicon-based materials. Our new low temperature wafer bonding techniques, which make the actuators possible, can also be used for precision integration of dissimilar materials in other micro-electro-mechanical systems."


The new actuators and bonding process are described in a paper, Fabrication and performance of a flextensional microactuator, which appears in the current online edition of the Journal of Micromechanics and Microengineering (JMM). The paper will also be featured in the October print version of JMM.

The authors are Jongpil Cheong, who earned his doctorate at Penn State this year, Abhijat Goyal, a doctoral candidate in electrical engineering, Dr. Tadigadapa and Dr. Christopher D. Rahn, professor of mechanical engineering.

The new actuators are made from flat strips of bulk PZT, a commercially available piezoelectric material that shrinks slightly when a voltage is applied to it, and a precision micromachined silicon beam. Bonding the silicon beam to the PZT amplifies and converts the PZT shape change into a convex deflection when the silicon beam buckles as the PZT shrinks.

In operation in the actuator, the measured deflection of the silicon beam shows a gain factor of 20 with respect to the PZT dimensional change.

For the bonding process in fabricating the new actuators, the Penn State researchers use photolithography and low temperature solders to produce the distinctive bridge shape they need.

Dr. Tadigadapa notes, "The PZT depoles if you heat it too high. Therefore, the temperature is crucial. A low temperature solder bonding process at 200 C was used in this work."

Using their new approach, the researchers have fabricated actuators with dimensions ranging from 350 to 600 microns in length, 50 to 100 microns (about the width of a human hair) in width, and 5 to 6 microns in thickness.

In tests, the actuators showed good repeatability with a large amplitude stroke of about 8 microns when actuated using -100V to 100V. The bandwidth of the actuator was measured at 265 KHz.

Barbara Hale | EurekAlert!
Further information:
http://www.psu.edu

More articles from Materials Sciences:

nachricht Watching atoms move in hybrid perovskite crystals reveals clues to improving solar cells
22.11.2017 | University of California - San Diego

nachricht Fine felted nanotubes: CAU research team develops new composite material made of carbon nanotubes
22.11.2017 | Christian-Albrechts-Universität zu Kiel

All articles from Materials Sciences >>>

The most recent press releases about innovation >>>

Die letzten 5 Focus-News des innovations-reports im Überblick:

Im Focus: New proton record: Researchers measure magnetic moment with greatest possible precision

High-precision measurement of the g-factor eleven times more precise than before / Results indicate a strong similarity between protons and antiprotons

The magnetic moment of an individual proton is inconceivably small, but can still be quantified. The basis for undertaking this measurement was laid over ten...

Im Focus: Frictional Heat Powers Hydrothermal Activity on Enceladus

Computer simulation shows how the icy moon heats water in a porous rock core

Heat from the friction of rocks caused by tidal forces could be the “engine” for the hydrothermal activity on Saturn's moon Enceladus. This presupposes that...

Im Focus: Nanoparticles help with malaria diagnosis – new rapid test in development

The WHO reports an estimated 429,000 malaria deaths each year. The disease mostly affects tropical and subtropical regions and in particular the African continent. The Fraunhofer Institute for Silicate Research ISC teamed up with the Fraunhofer Institute for Molecular Biology and Applied Ecology IME and the Institute of Tropical Medicine at the University of Tübingen for a new test method to detect malaria parasites in blood. The idea of the research project “NanoFRET” is to develop a highly sensitive and reliable rapid diagnostic test so that patient treatment can begin as early as possible.

Malaria is caused by parasites transmitted by mosquito bite. The most dangerous form of malaria is malaria tropica. Left untreated, it is fatal in most cases....

Im Focus: A “cosmic snake” reveals the structure of remote galaxies

The formation of stars in distant galaxies is still largely unexplored. For the first time, astron-omers at the University of Geneva have now been able to closely observe a star system six billion light-years away. In doing so, they are confirming earlier simulations made by the University of Zurich. One special effect is made possible by the multiple reflections of images that run through the cosmos like a snake.

Today, astronomers have a pretty accurate idea of how stars were formed in the recent cosmic past. But do these laws also apply to older galaxies? For around a...

Im Focus: Visual intelligence is not the same as IQ

Just because someone is smart and well-motivated doesn't mean he or she can learn the visual skills needed to excel at tasks like matching fingerprints, interpreting medical X-rays, keeping track of aircraft on radar displays or forensic face matching.

That is the implication of a new study which shows for the first time that there is a broad range of differences in people's visual ability and that these...

All Focus news of the innovation-report >>>

Anzeige

Anzeige

Event News

Ecology Across Borders: International conference brings together 1,500 ecologists

15.11.2017 | Event News

Road into laboratory: Users discuss biaxial fatigue-testing for car and truck wheel

15.11.2017 | Event News

#Berlin5GWeek: The right network for Industry 4.0

30.10.2017 | Event News

 
Latest News

IceCube experiment finds Earth can block high-energy particles from nuclear reactions

24.11.2017 | Physics and Astronomy

A 'half-hearted' solution to one-sided heart failure

24.11.2017 | Health and Medicine

Heidelberg Researchers Study Unique Underwater Stalactites

24.11.2017 | Earth Sciences

VideoLinks
B2B-VideoLinks
More VideoLinks >>>