The large purple rectangle in this colorized image is a chip feature about 40 by 150 nanometers in size, surrounded by encapsulating material. The magnified section shows the planes of silicon atoms used to calibrate feature measurements. Photo courtesy NIST
Device features on computer chips as small as 40 nanometers (nm) wide--less than one-thousandth the width of a human hair--can now be measured reliably thanks to new test structures developed by a team of physicists, engineers, and statisticians at the Commerce Department’s National Institute of Standards and Technology (NIST), SEMATECH, and other collaborators. The test structures are replicated on reference materials that will allow better calibration of tools that monitor the manufacturing of microprocessors and similar integrated circuits.
The new test structures are the culmination of NIST’s more than four-year effort to provide standard "rulers" for measuring the narrowest linear features that can be controllably etched into a chip. The NIST rulers are precisely etched lines of crystalline silicon ranging in width from 40 nm to 275 nm. The spacing of atoms within the box-shaped silicon crystals is used like hash marks on a ruler to measure the dimensions of these test structures. Industry can use these reference materials to calibrate tools to reliably measure microprocessor-device gates, for example, which control the flow of electrical charges in chips.
"We have caught up to the semiconductor industry roadmap for linewidth reference-material dimensions with this work," says Richard Allen, one of the NIST researchers involved in the project. "With the semiconductor industry, one has to run at full speed just to keep up."
Laura Ost | EurekAlert!
Scientists channel graphene to understand filtration and ion transport into cells
11.12.2017 | National Institute of Standards and Technology (NIST)
Successful Mechanical Testing of Nanowires
07.12.2017 | Helmholtz-Zentrum Geesthacht - Zentrum für Material- und Küstenforschung
MPQ scientists achieve long storage times for photonic quantum bits which break the lower bound for direct teleportation in a global quantum network.
Concerning the development of quantum memories for the realization of global quantum networks, scientists of the Quantum Dynamics Division led by Professor...
Researchers have developed a water cloaking concept based on electromagnetic forces that could eliminate an object's wake, greatly reducing its drag while...
Tiny pores at a cell's entryway act as miniature bouncers, letting in some electrically charged atoms--ions--but blocking others. Operating as exquisitely sensitive filters, these "ion channels" play a critical role in biological functions such as muscle contraction and the firing of brain cells.
To rapidly transport the right ions through the cell membrane, the tiny channels rely on a complex interplay between the ions and surrounding molecules,...
The miniaturization of the current technology of storage media is hindered by fundamental limits of quantum mechanics. A new approach consists in using so-called spin-crossover molecules as the smallest possible storage unit. Similar to normal hard drives, these special molecules can save information via their magnetic state. A research team from Kiel University has now managed to successfully place a new class of spin-crossover molecules onto a surface and to improve the molecule’s storage capacity. The storage density of conventional hard drives could therefore theoretically be increased by more than one hundred fold. The study has been published in the scientific journal Nano Letters.
Over the past few years, the building blocks of storage media have gotten ever smaller. But further miniaturization of the current technology is hindered by...
With innovative experiments, researchers at the Helmholtz-Zentrums Geesthacht and the Technical University Hamburg unravel why tiny metallic structures are extremely strong
Light-weight and simultaneously strong – porous metallic nanomaterials promise interesting applications as, for instance, for future aeroplanes with enhanced...
11.12.2017 | Event News
08.12.2017 | Event News
07.12.2017 | Event News
14.12.2017 | Health and Medicine
14.12.2017 | Physics and Astronomy
14.12.2017 | Life Sciences